Ni-Cr与Al/CuO含能薄膜复合的换能元制备与性能分析  

Preparation and Performance Analysis of Transducers Composited with Ni-Cr and Al/CuO Energy-Containing Thin Films

作　　者：武韬 郝永平[2] 刘双杰[2] 王洪星 张家彬 Wu Tao;Hao Yongping;Liu Shuangjie;Wang Hongxing;Zhang Jiabin(College of Mechanics Engineering,Shenyang Ligong University,Shenyang 110158,China;College of Equipment Engineering,Shenyang Ligong University,Shenyang 110158,China)

机构地区：[1]沈阳理工大学机械工程学院,沈阳110158 [2]沈阳理工大学装备工程学院,沈阳110158

出　　处：《微纳电子技术》2025年第2期132-141,共10页Micronanoelectronic Technology

基　　金：军科委创新基金(LYJJ-2022-03LS)。

摘　　要：随着换能元向着微型化和高可靠性的方向发展,通过磁控溅射法设计并加工一种简易的Ni-Cr薄膜换能元结构,制备矩形桥和倒V形桥两种不同桥形的薄膜,并将其与Al/CuO含能薄膜复合。结果表明,两种桥形结构均能在不同激励条件下可靠发火,在8 V恒压激励下,矩形桥和倒V形桥的最高温度分别可达约360和550℃;在40 V、100μF的电容激励下,含Al/CuO的Ni-Cr薄膜换能元在电爆程度、火焰持续时间、输出能量和能量利用率等方面均优于裸桥的Ni-Cr薄膜换能元,且倒V形桥的点火性能尤为突出。在桥区中心涂覆三硝基间苯二酚铅后,均能点燃火药。含Al/CuO的Ni-Cr薄膜换能元在点燃火药时,电爆程度增大,持续时间较长。表明Al/CuO含能薄膜与Ni-Cr薄膜复合后可提升点火性能,且作用时间在微秒级。With the development of transducers towards miniaturisation and high reliability,a simple Ni-Cr thin film transducers structure was designed and processed by magnetron sputtering method,and two kinds of thin films with different bridge shapes,rectangular bridge and inverted V-shaped bridge,were prepared and composited with Al/CuO energy-containing films.The results show that both bridge structures can reliably fire under different excitation conditions,and the maximum temperatures of rectangular and inverted V-shaped bridges can be up to about 360℃and 550℃under constant voltage excitation of 8 V,respectively.Under capacitive excitation of 40 V and 100 μF, the Ni-Cr thin film transducers containing Al/CuO is superior tothe bare-bridge Ni-Cr thin film transducers in terms of the degree of electroburst, flameduration, output energy and energy utilisation, etc. The ignition performance of the inverted Vshapedbridge is particularly outstanding. All of them are able to ignite the gunpowder aftercoating lead trinitroresorcinate in the centre of the bridge area. The Al/CuO-containing Ni-Crthin film transducers have increased degree of electroburst and longer flame duration whenigniting the gunpowder. It is shown that the Al/CuO energy-containing film composite with Ni-Cr thin film can enhance the ignition performance and the action time is in the microsecond level.

关 键 词：磁控溅射 Ni-Cr薄膜 Al/CuO含能薄膜 三硝基间苯二酚铅 点火能力 

分 类 号：TJ45[兵器科学与技术—火炮、自动武器与弹药工程]