基于GMR传感器的国产伏羲芯片表面缺陷检测系统设计  

Design of Surface Defect Detection System for Domestic Fuxi Chips Based on GMR Sensors

作　　者：汪海涛 林永铨 陶维华 许健 WANG Haitao;LIN Yongquan;TAO Weihua;XU Jian(Zhongshan Jucheng Electric Power Co.,Ltd.,Zhongshan 528400,China;Willfar Information Co.,Ltd.,Changsha 410012,China)

机构地区：[1]中山市菊城电力有限公司,广东中山528400 [2]威胜信息技术股份有限公司,长沙410012

出　　处：《计算机测量与控制》2025年第2期23-30,70,共9页Computer Measurement &Control

基　　金：中山市菊城电力有限公司(JCDL-YPRH20221101)。

摘　　要：国产伏羲芯片组成结构较为复杂,为了加强对国产伏羲芯片的安全保护,确保芯片品质符合设计规格和标准,设计并开发了基于GMR传感器的国产伏羲芯片表面缺陷检测系统;加设GMR传感器和检波器,改装核心处理器、信号放大器、数据存储器和图像采集模块,完成硬件部分优化;利用GMR传感器获取伏羲芯片表面磁场反馈信号,拼接国产伏羲芯片表面图像数据,通过信号补偿、标准化以及图像增强等步骤,从磁场信号和图像数据两个方面,提取芯片表面特征,通过特征匹配确定当前芯片表面的缺陷状态,得出缺陷类型、位置以及面积的检测结果;实验结果证明:该系统对国产伏羲2360芯片表面缺陷位置检测误差比另两种传统检测系统分别降低1.5 mm和1.2 mm,对国产伏羲2380芯片表面缺陷位置检测误差比另两种传统检测系统分别降低2 mm和1.5 mm,对国产伏羲2420芯片表面缺陷位置检测误差比另两种传统检测系统分别降低1.4 mm和1 mm;在10种芯片缺陷类型下,该系统表面缺陷面积检测误差明显较低。Domestic Fuxi chips have complex structures,in order to improve the safety protection of domestic Fuxi chips and ensure that the chip quality meets the design specifications and standards,a surface defect detection system for domestic Fuxi chips based on giant magneto resistive(GMR)sensors is designed and developed.Install the GMR sensors and detectors,modify the core processor,signal amplifier,data memory,and image acquisition module,and complete hardware optimization.Use the GMR sensors to obtain feedback signals on the surface magnetic field of Fuxi chips,splice the domestic Fuxi chip surface image data,extract the chip surface features from the magnetic field signals and image data through signal compensation,standardization,and image enhancement,determine current defect state on chip surface through feature matching,and obtain the detection results of defect types,positions,and areas.Experimental results show that compared with the other two traditional detection systems,the system reduces the surface defect detection errors of domestic Fuxi 2360 chips by 1.5 mm and 1.2 mm,the surface defect detection errors of domestic Fuxi 2380 chips by 2 mm and 1.5 mm,and the surface defect detection errors of domestic Fuxi 2420 chips by 1.4 mm and 1 mm.Among the 10 types of chip defects,the system significantly reduces the detection errors of surface defect area.

关 键 词：GMR传感器 国产伏羲芯片 芯片表面缺陷 表面检测 

分 类 号：TP407[自动化与计算机技术]