MEMS环形陀螺仪带宽拓展控制器设计  

Design of bandwidth extension controller for MEMS ring gyroscope

作　　者：崔让 魏雯强 蔡麒 刘宇鹏 曹慧亮 Cui Rang;Wei Wenqiang;Cai Qi;Liu Yupeng;Cao Huiliang(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Hubei Sanjiang Aerospace Hongfeng Control Co.LTD,Xiaogan 432000,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]湖北三江航天红峰控制有限公司,孝感432000

出　　处：《仪器仪表学报》2024年第12期45-54,共10页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划(2022YFB3205000);国家自然科学基金(U2230206)项目资助。

摘　　要：设计一种基于零极点补偿的比例积分控制器,用于MEMS环形振动陀螺的检测模态闭环回路控制。文章分别分析了环形陀螺仪机械灵敏度、带宽与陀螺仪模态之间谐振频率差值、品质因数的关系,并通过伯德图分析了零极点与陀螺带宽的关系。设计了基于零极点补偿的比例积分控制器(PZ-PIC),通过在检测闭环回路中使用该控制器,可以拓展陀螺仪的带宽,解决环形陀螺仪机械带宽与机械灵敏度相互矛盾的问题。提出的新型控制器具有参数少,参数确定简单等优点,适用于MEMS陀螺仪的批量化生产。经过实验验证,3只陀螺仪样机带宽均得到有效拓展,拓展后带宽超过90 Hz。This article designs a pole-zero compensation proportional-integral controller for the sense mode closed-loop control of MEMS ring vibration gyroscope.The relationships between the mechanical sensitivity and bandwidth of the ring gyroscope and the difference of resonant frequencies and the quality factor are analyzed.The effectiveness of pole-zero on the gyroscope bandwidth is analyzed by the bode diagram.A pole-zero compensation proportional-integral controller(PZ-PIC)is designed.By using this controller in the sense mode closed-loop circuit,the bandwidth of the gyroscope can be expanded.In this way,the contradiction between the mechanical bandwidth and mechanical sensitivity of the ring gyroscope is addressed.The proposed new controller has the advantages of few parameters and simple parameter determination,which is suitable for the mass production using MEMS gyroscopes.After experimental evaluation,the bandwidth of the three prototypes is effectively expanded,with the expanded bandwidth exceeding 90 Hz.This paper designs a pole-zero compensation proportional-integral controller for the sense mode closed-loop control of MEMS ring vibration gyroscope.The relationships between the mechanical sensitivity and bandwidth of the ring gyroscope and the difference of resonant frequencies and the quality factor were analyzed,and the effect of pole-zero on the gyroscope bandwidth is analyzed by bode diagram.A pole-zero compensation proportional-integral controller(PZ-PIC)is designed,and by using this controller in the sense mode closed-loop circuit,the bandwidth of the gyroscope can be expanded,thereby solving the contradiction between the mechanical bandwidth and mechanical sensitivity of the ring gyroscope.The proposed new controller has the advantages of few parameters and simple parameter determination,and is suitable for mass production of MEMS gyroscopes.After experimental verification,the bandwidth of the three prototypes was effectively expanded,with the expanded bandwidth exceeding 90 Hz.

关 键 词：MEMS环形陀螺仪 振动陀螺仪 带宽拓展 检测模态闭环控制 

分 类 号：TH824[机械工程—仪器科学与技术]