不导电膜层材料截面扫描电镜分析制样方法探讨  

Discussion on sample preparation method for scanning electron microscope analysis of non-conductive film cross-section

作　　者：黄艳萍 刘毅 田茜茜 Huang Yanping;Liu Yi;Tian Qianqian(Wuxi Institute of Inspection Testing and Certification,National Center of Inspection on Solar Photovoltaic Products Quality,Wuxi 214028,China)

机构地区：[1]无锡市检验检测认证研究院,国家太阳能光伏产品质量检验检测中心,无锡214028

出　　处：《分析仪器》2025年第1期74-77,共4页Analytical Instrumentation

基　　金：无锡市检验检测认证研究院基金项目(2024JYKJ001、2024JYKJ007)。

摘　　要：对于导电导热性差的膜层,利用扫描电镜获取其截面微观形貌时,样品制备过程直接影响形貌图像的质量。本研究根据膜层厚度及物理特性提出了不同的制样方法,对于微米级厚度膜层,可采用脆断、机械打磨抛光等方式取样,喷镀导电膜一般无特殊要求;对于纳米级厚度膜层,一般采用脆断方式取样。另外,导电处理喷镀的靶材、设备及喷镀时间等因素均会对形貌图像产生较大影响。In this paper,different sample preparation methods are proposed according to the thickness and physical properties of the film.For the film with micron thickness,sampling methods such as brittle fracture,inlay grinding and other methods can be used,and there are generally no special requirements for spraying conductive film.For nano-scale thickness film,brittle fracture method is generally used.In addition,the praying target material,spraying equipment and spraying time of conductive treatment have a great influence on the morphology image.

关 键 词：不导电膜 扫描电镜 截面形貌 制样方法 

分 类 号：TN16[电子电信—物理电子学] TB383.2[一般工业技术—材料科学与工程]