基于电晕放电电离MEMS离子迁移谱的SF6泄漏高灵敏探测技术研究  

Highly sensitive detection technology for SF6 leakage based on corona discharge ionization MEMS ion migration spectrometry

作　　者：韩彦微 张永挺 刘振华 刘宏 Han Yanwei;Zhang Yongting;Liu Zhenhua;Liu Hong(Zhongshan Power Supply Bureau of Guangdong Power Grid Co.,Ltd.,Zhongshan 528400,China;Zhuhai Hengrui power technology Co.,Ltd.,Zhuhai 519071,China)

机构地区：[1]广东电网有限责任公司中山供电局,中山528400 [2]珠海市恒瑞电力科技有限公司,珠海519071

出　　处：《分析仪器》2025年第1期82-87,共6页Analytical Instrumentation

基　　金：广东电网有限责任公司科技项目资助(No.GDKJXM20230709)。

摘　　要：电力设备中SF_(6)泄漏早期检测预警在设备运行安全和全球温室效应控制方面具有重要意义。本研究提出了一种基于电晕放电电离的MEMS离子迁移谱传感方法,获取了不同分离电压(DV)下的SF_(6)特征谱图,考察了MEMS离子迁移谱对SF_(6)的浓度响应特性、检测限、动态响应特性和长时间工作稳定性,并在此基础上开展了电晕放电电离放电参数对检测性能影响研究。测试结果表明,当DV=1400V时SF_(6)的特征谱图峰位置为7.74V,浓度响应符合幂函数曲线,拟合优度R^(2)=0.99994,检测灵敏度达到0.01μL/L,响应时间仅需0.27s,5日信号波动小于2.76%。Early detection and warning of SF_(6)leakage in electric power equipment is of great significance for the safe operation of equipment and the control of global greenhouse effects.This study proposed a MEMS ion migration spectrometry sensing method based on corona discharge ionization to obtain the characteristic spectra of SF_(6)at different dispersion voltage(DV).The concentration response characteristics,detection limit,dynamic response characteristics,and long-term working stability of SF_(6)by the MEMS ion migration spectrometer were investigated.Based on this,the impact of discharge parameters of corona discharge ionization on detection performance was studied.The test results showed that when DV=1400V,the peak position of the SF_(6)characteristic spectrum was 7.74V,the concentration response conforms to power function curve,the goodness of fit R^(2)=0.99994,the detection sensitivity reached 0.01μL/L,the response time was only 0.27s,and the signal fluctuation over five days was less t han 2.76%.

关 键 词：六氟化硫泄漏检测 离子迁移谱 电晕放电电离 高灵敏探测 

分 类 号：TM213[一般工业技术—材料科学与工程] O657.7[电气工程—电工理论与新技术]