高精度硅谐振压力变送器研究  

Research on High Precision Silicon Resonant Pressure Transmitter

作　　者：刘维嵩 赵钦君[1] LIU Weisong;ZHAO Qinjun(School of Automation and Electrical Engineering,University of Jinan,Jinan 250024,China)

机构地区：[1]济南大学自动化与电气工程学院,山东济南250024

出　　处：《自动化仪表》2025年第2期107-110,116,共5页Process Automation Instrumentation

摘　　要：为了将硅谐振压力传感器的频率信号数字化、将压力信号转变为标准的模拟信号,针对高精度硅谐振压力传感器设计了一种将谐振频率信号数字化的硅谐振压力变送器。该变送器在硬件上选用数模转换器(DAC)芯片AD5420、集成电路(IC)调制解调芯片AD5700以及嵌入式微处理器STM32F303CBT6来优化电路设计模块,提升了在压力检测环境中的稳定性。该变送器在软件上通过构建方程,将传感器的频率信号转化成标准的4~20 mA模拟信号,并采用引入中间阈值的方法进一步提升了变送器的转换精度。测试结果表明,该变送器的精度达到0.01%FS。该设计实现了硅谐振压力变送器在绝压下对压力信号高精度、高稳定性的输出。该变送器与硅压阻压力变送器相比,性能有明显提升,可满足工业应用领域中对压力的高精度转换要求。To digitize the frequency signal of the silicon resonant pressure sensor and convert the pressure signal into a standard analog signal,a silicon resonant pressure transmitter is designed to digitize the resonant frequency signal for high-precision silicon resonant pressure sensor.The transmitter uses digital-to-analog converter(DAC)chip AD5420,integrated circuit(IC)modem chip AD5700,and embedded microprocessor STM32F303CBT6 in hardware to optimize the circuit design module,which improves the stability in the pressure detection environment.The transmitter converts the frequency signal of the sensor into a standard 4~20 mA analog signal through the construction of equations on the software,and the method of introducing an intermediate threshold is used to further improve the conversion accuracy of the transmitter.The test results show that the accuracy of the transmitter reaches 0.01%FS.The design realizes the silicon resonant pressure transmitters high-precision and high-stability output of pressure signals under adiabatic pressure.The performance of this transmitter is significantly improved compared with that of the silicon piezoresistive pressure transmitter,and it can meet the requirement of high-precision conversion of pressure in industrial applications.

关 键 词：硅谐振压力传感器 电路设计 频率信号 模拟信号 中间阈值 压力变送器 高精度转换 

分 类 号：TH812[机械工程—仪器科学与技术]