细晶粒高纯铌管靶材的研制  

Development of Fine Grain High Purity Niobium Tube Target

作　　者：吴孟海 余涛[1] 聂腾飞 张浩 朱芳 张国祥 WU Menghai;YU Tao;NIE Tengfei;ZHANG Hao;ZHU Fang;ZHANG Guoxiang(International Institute of Materials Innovation,Nanchang University,Nanchang 330031,China;Jiujiang Tanbre Co.,Ltd.,Jiujiang 332014,China)

机构地区：[1]南昌大学国际材料创新研究院,江西南昌330031 [2]九江有色金属冶炼有限公司,江西九江332014

出　　处：《铜业工程》2025年第1期9-15,共7页Copper Engineering

基　　金：国家自然科学基金项目(52363031)资助。

摘　　要：为了得到具有细小均匀组织的铌管靶材,研究了高纯细晶粒铌管靶材的制备新工艺。首先对Φ300 mm的高纯铌锭进行锻造和真空退火,然后经车削和钻孔加工成挤压锭坯,将该锭坯在热穿孔机上将孔径从65 mm扩至95 mm,再次加热后在挤压机上挤压为铌管靶坯,最后经过真空退火和机械加工制备出高纯铌管靶材成品。金相试验结果显示,该铌管靶材产品晶粒细小而均匀,横向平均晶粒度达到了38µm(6.5级),纵向平均晶粒度达到了32µm(7.0级);电子背散射衍射(EBSD)试验结果显示,挤压态铌管靶材产品的织构主要由<001>组成,再结晶态铌管靶材产品的织构主要由<110>和<111>组成。This paper studied a new process for preparing high-purity fine-grained niobium tube target materials,in order to obtain niobium tube target materials with small and uniform structure.Firstly,high-purity niobium ingot ofΦ300 mm diameter was forged and vacuum annealed,and then,it is processed into extruded ingot through turning and drilling,The hole in the ingot was enlarged on the hot perforating machine fromΦ65 mm toΦ93 mm,extruding into niobium tube target on the extruding machine after heating.Highpurity niobium tube target products were obtained after vacuum annealing and mechanical processing.The metallographic test results show that the niobium tube target product has fine and uniform grain size,the average grain size is 38µm in the horizontal direction,and 32µm in the vertical direction.The electron back scatter diffraction(EBSD),test results show that the texture of the extruded niobium tube target product is mainly composed of<001>,the texture of the recrystallized niobium tube target product is mainly a mixed texture composed of two components:<110>and<111>.

关 键 词：铌管靶 细晶 穿孔 挤压 织构 

分 类 号：TG146.4[一般工业技术—材料科学与工程]