线性可控电热式MEMS微镜设计与仿真分析  

Design and Simulation Analysis of Linear Controllable Electrothermal MEMS Micromirrors

作　　者：张博伦 李庆党 祝方舟 ZHANG Bolun;LI Qingdang;ZHU Fangzhou(School of Mechanical and Electrical Engineering,Qingdao University of Science and Technology,Qingdao 266100;Sino-German Institute of Economic Engineering,Qingdao University of Science and Technology,Qingdao 266100)

机构地区：[1]青岛科技大学机电工程学院,青岛266100 [2]青岛科技大学中德科技学院,青岛266100

出　　处：《计算机与数字工程》2025年第1期71-76,共6页Computer & Digital Engineering

摘　　要：论文对MEMS微镜领域电热式偏转结构的基础上,提出了一种全新的悬臂梁式MEMS微镜结构设计,并且对该结构的电热选材进行了对比,在同等电压下,不同加热材料会出现不同的结构形变,同时对MEMS微镜悬臂梁结构进行了尺寸仿真优化,最终该MEMS微镜能够实现随着施加的电压变化,微镜偏转的角度线性可控。Based on the electrothermal deflection structure in the field of MEMS micro mirror,this paper proposes a new struc⁃tural design of cantilever MEMS micro mirror,and compares the electrothermal material selection of this structure.Under the same voltage,different heating materials will have different structural deformation.At the same time,the size of MEMS micro mirror canti⁃lever structure is simulated and optimized.Finally,the MEMS micro mirror can change with the applied voltage.The deflection an⁃gle of the micro mirror is linearly controllable.

关 键 词：微机电系统 线性可控 电热式微镜 多层结构 

分 类 号：TN491[电子电信—微电子学与固体电子学]