聚醚醚酮表面W掺杂类金刚石薄膜结构及其摩擦性能  

Structures and Tribological Performance of W-doped Diamond-like Carbon Films on Polyether Ether Ketone

作　　者：崔丽 邱慧 周小卉 朱邵超 郭鹏 陈仁德 汪爱英[1,3] 西村一仁 CUI Li;QIU Hui;ZHOU Xiaohui;ZHU Shaochao;GUO Peng;CHEN Rende;WANG Aiying;KAZUHITO Nishimura(Key Laboratory of Advanced Marine Materials,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China;Ningbo Yongxin Optics Co.,Ltd.,Ningbo 315040,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院宁波材料技术与工程研究所海洋关键材料重点实验室,宁波315201 [2]宁波永新光学股份有限公司,宁波315040 [3]中国科学院大学材料与光电研究中心,北京100049

出　　处：《中国表面工程》2024年第6期271-282,共12页China Surface Engineering

基　　金：国家自然科学基金(U20A20296,52127803);宁波市重点研发计划(2023Z021);宁波市高新区重大技术创新项目(2021CCX050003)。

摘　　要：聚醚醚酮(PEEK)广泛应用于航空航天领域,因其本征粘弹性和低硬度,PEEK极易发生磨损失效。为解决此难题,一般采用表面沉积类金刚石(DLC)薄膜的方法。利用线性离子束复合直流磁控溅射技术,调控Ar/C_(2)H_(2)气流比(68/12~62/18),在PEEK表面制备不同W元素掺杂含量的DLC薄膜。系统研究气流比对PEEK/W-DLC材料的组分结构、力学和摩擦性能的影响规律。结果表明,气流比降低使薄膜表面C粒子团簇尺寸增大和致密化。W元素含量由7.08at.%下降至2.63at.%,且主要以WC_(1-x)纳米晶簇分布在C基质中,I_(D)/I_(G)值由0.42下降至0.32。C元素含量的增加使膜内生成更多的C-C键,部分C=O键转化为C-O键。PEEK/W-DLC材料表面褶皱密度增大,界面处形成机械咬合结构。气流比66/14时,材料具有优异的力学和摩擦性能,磨损率低至1.52×10^(-8) mm^(3)/(N·m)。这主要归功于碳膜的力学性能保护及磨斑处富W润滑转移膜的形成。通过分析材料表面凹坑结构的形成机理,发现摩擦过程中同时存在粘着磨损和磨粒磨损。研究结果将有助于指导设计开发高效耐磨的航空航天材料。Polyether ether ketone (PEEK) is widely used in aerospace applications because of its excellent physical and mechanical properties.However,given its intrinsic viscoelasticity and low hardness,PEEK is prone to wear failure.To address this problem,a carbon-based film deposition technology is typically applied.Among these films,diamond-like carbon (DLC) films have attracted considerable attention owing to their high hardness,good wear resistance,and chemical inertness.Using a linear ion beam combined with direct current magnetron sputtering technology,W-DLC films with different doping contents were prepared on PEEK by varying the Ar/C_(2)H_(2) flow ratios from 68/12 to 62/18.The effects of the gas flow ratio on the composition,microstructure,and mechanical and friction properties of the PEEK/W-DLC composites were systematically examined.The SEM and HRTEM results showed that as the Ar/C_(2)H_(2) flow ratio decreased,the deposition rate of the film gradually increased,the carbon clusters densified and their size increased.As the gas flow ratio decreased,the size of W clusters decreased,leading to a decline in the content of highly crystalline WC_(1-x).Moreover,when compared with pure PEEK,the surface wrinkle density of the PEEK/W-DLC composites increased and mechanical interlock structures were formed at the interface.The X-cut test showed that as the gas flow ratio decreased,the interfacial adhesion weakened,and the peeling of the films tended to become obvious.The XPS data showed that the W content decreased from7.08at.%to 2.63at.%.The increase in C content resulted in the formation of more C-C bonds,and some of C=O bonds preferentially transformed into C-O bonds.With a decrease in the gas flow ratio,the W^(0) content decreased,whereas the W^(5+)/W^(6+)content increased slightly.This indicated that the W element in the film tended to exist in the form of W carbides.Raman analysis showed that I_(D)/I_(G )decreased from 0.42 to 0.32,the sp^(2) content and cluster size decreased accordingly.The full width at half maxim

关 键 词：聚醚醚酮(PEEK) 类金刚石薄膜 金属掺杂 微观结构 摩擦性能 

分 类 号：TH117[机械工程—机械设计及理论]