基于倍福PLC的MOCVD设备控制系统设计研究  

Design of Control System for MOCVD Based on Beckhoff PLC

作　　者：熊峥 李明 周立平 叶肖杰 XIONG Zheng;LI Ming;ZHOU Liping;YE Xiaojie(The 48^(th)Research Institute of CETC,Changsha 410111,China)

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2025年第1期13-20,共8页Equipment for Electronic Products Manufacturing

摘　　要：为实现MOCVD设备的稳定运行与控制,通过分析MOCVD设备的子系统组成、PLC硬件网络及控制系统,结合系统的安全性设计,研究了一套基于倍福PLC的MOCVD设备控制系统。通过实际运行,该套电气控制系统电气强弱分离,整体结构层次感强,易于维护,运行稳定可靠,安全等级高,可满足半导体工业生产要求。In order to achieve the stable operation and control of MOCVD equipment,this paper studies a MOCVD equipment control system based on Beckhoff PLC by analyzing the subsystem composition,PLC hardware network and control system of MOCVD equipment,and combining it with system safety design.Through the actual operation status,it is shown that the electrical control system separates the strong and weak electrical components,has a strong sense of hierarchy in its overall structure,is easy to maintain,runs stably and reliably,has a high safety level,and can meet the requirements of semiconductor industrial production.

关 键 词：MOCVD设备 安全性设计 PLC控制系统 

分 类 号：TN304.05[电子电信—物理电子学]