多晶硅还原生产系统节能提质探讨  

Discussion on Energy Saving and Quality Improvementof Polysilicon Reduction Production System

作　　者：石何武[1] 张升学[1] 杨永亮[1] SHI Hewu;ZHANG Shengxue;YANG Yongliang(China ENFI Engineering Corporation,Beijing 100038,China)

机构地区：[1]中国恩菲工程技术有限公司,北京100038

出　　处：《绿色矿冶》2025年第1期55-59,70,共6页Sustainable Mining and Metallurgy

摘　　要：多晶硅作为光伏行业和半导体行业的基础材料,近年来发展迅速。还原生产系统作为多晶硅生产的关键环节,其装备技术水平、工艺流程先进性、系统热能利用合理性是关系多晶硅稳定生产的重要因素。本文介绍了多晶硅还原装备的发展历程,分析了还原系统液相供料方式和气相供料方式的选择,并重点研究了还原生产过程还原炉钟罩水、还原尾气、底盘水的余热回收利用技术,为多晶硅生产建设以及运行提供参考,以期实现高效、节能、绿色环保的多晶硅还原生产目标。As the basic material of photovoltaic industry and semiconductor industry,polycrystalline silicon has developed rapidly in recent years.As the key link of polysilicon production,the equipment and technology level,the advanced process flow and the rationality of system heat energy utilization are the important factors related to the stable production of polysilicon.This paper introduced the development process of polysilicon reduction equipment,analyzed the selection of liquid phase feeding mode and gas phase feeding mode of reduction system,and focused on the waste heat recovery and utilization technology of reduction furnace bell water,reduction tail gas and chassis water in the reduction production process,so as to provide reference for the construction and operation of polysilicon production,in order to achieve the goal of high efficiency,energy saving and green environmental protection of polysilicon reduction production.

关 键 词：多晶硅 还原炉 汽化器 余热回收 供料方式 节能 

分 类 号：TQ127.2[化学工程—无机化工]