高温环境下石墨舟卡点装配性能的数值模拟分析  

PERFORMANCE OF GRAPHITE BOAT STUCK POINTS UNDER HIGH TEMPERATURE ENVIRONMENT

作　　者：鄢庆阳 王刚 冀梦豪 钟歆怡 吕志军[1] Yan Qingyang;Wang Gang;Ji Menghao;Zhong Xinyi;Lyu Zhijun(College of Mechanical Engineering,Donghua University,Shanghai 201620,China;Shanghai Hongfeng Industrial Co.,Ltd.,Shanghai 201716,China)

机构地区：[1]东华大学机械工程学院,上海201620 [2]上海弘枫实业有限公司,上海201716

出　　处：《太阳能》2025年第2期96-104,共9页Solar Energy

摘　　要：为了防止石墨舟片在高温环境下发生相对移动或松动,石墨舟卡点通常采用过盈配合的方式进行装配,以增加连接的刚性与支撑的稳定性,设计合理的过盈量对硅片的稳定性及石墨舟卡点的服役性能至关重要。通过有限元模拟方法对石墨舟卡点的压装过程进行了模拟,并对常温和高温环境下的石墨舟卡点装配性能进行了数值分析,提出了适应不同高温环境的石墨舟卡点过盈量选配方案。研究结果表明:1)常温环境下,压装力及石墨舟卡点接触应力均随着石墨舟卡点过盈量的增加而增加;当石墨舟卡点过盈量由0μm增加到20μm时,最大石墨舟卡点接触应力由0.22 MPa增至18.03 MPa,最大压装力由1.1 N增至84.9 N。2)高温环境下,当石墨舟卡点过盈量保持不变时,随着管式PECVD设备的腔内温度升高,最大石墨舟卡点接触应力逐渐增大。3)腔内温度为530℃、石墨舟卡点的过盈量为15μm时,石墨舟卡点接触应力最大值位于石墨舟片侧边,说明此处更容易发生失效损坏;而石墨舟卡点接触应力最小值位于石墨舟片中部附近。因此,确定高温环境下的石墨舟卡点过盈量时,建议优先分析石墨舟片侧边处的石墨舟卡点接触应力分布情况。4)建议管式PECVD设备的腔内温度不宜超过530℃,且石墨舟卡点过盈量尽量控制在5~15μm之间。若需要将腔内温度提升至530℃以上,建议将石墨舟卡点过盈量控制在5~10μm;若只考虑设备的镀膜效率,不考虑石墨材料的工作时长,则可将过盈量放宽至5~15μm。In order to prevent relative movement or loosening of graphite boat plates in high-temperature environments,the graphite boat stuck points are usually assembled using interference fit to increase the rigidity of the connection and the stability of the support.Designing a reasonable interference fit is crucial for the stability of the silicon wafer and the service performance of the graphite boat stuck points.This paper simulates the pressing process of graphite boat stuck points through finite element simulation method,and numerically analyzes the assembly performance of graphite boat stuck points under normal and high temperature environments.It proposes an interference fit tolerance selection scheme for graphite boat stuck points that is suitable for different high temperature environments.The research results show that:1)At room temperature,both the pressing force and the contact stress of the graphite boat stuck point increase with the increase of the interference fit tolerance of the graphite boat stuck point.When the interference fit tolerance of graphite boat stuck points increases from 0μm to 20μm,the maximum contact stress of graphite boat stuck points increases from 0.22 MPa to 18.03 MPa,the maximum pressing force increases from 1.1 N to 84.9 N.2)Under high temperature conditions,with the same interference fit tolerance of graphite boat sticking points,as the body cavity temperature of tubular PECVD equipment increases,the maximum contact stress of graphite boat sticking points gradually increases.3)When the body cavity temperature is 530℃and the interference fit tolerance of the graphite boat stuck point is 15μm,the maximum contact stress of the graphite boat stuck point is located on the side of the graphite boat sheet,indicating that failure and damage are more likely to occur here.The minimum contact stress of the graphite boat stuck point is located near the middle of the graphite boat sheet.Therefore,when determining the interference fit tolerance of graphite boat stuck points in high tempera

关 键 词：太阳电池 硅片 石墨舟卡点 过盈配合 过盈量 压装力 高温环境 

分 类 号：TM914.41[电气工程—电力电子与电力传动]