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作 者:郭东红 彭福生 彭栋梁[2] 蒋香草 方毅金 吕晟 黄灿鑫 GUO Donghong;PENG Fusheng;PENG Dongliang;JIANG Xiangcao;FANG Yijin;LYU Sheng;HUANG Canxin(Xiamen Hongwu Tungsten&Molybdenum Co.,Ltd.,Xiamen 361021,Fujian,China;College of Materials,Xiamen University,Xiamen 361005,Fujian,China)
机构地区:[1]厦门虹鹭钨钼工业有限公司,福建厦门361021 [2]厦门大学材料学院,福建厦门361005
出 处:《中国钨业》2024年第5期56-62,共7页China Tungsten Industry
摘 要:钨镧合金丝作为切割硅片的金刚线母线得到大量应用,为保证钨镧合金丝生产质量及生产连续性和高效性,需要控制拉拔过程的断丝率。通过对拉拔过程中的断丝收集,采用扫描电子显微镜、X射线能谱仪对断口进行观察和分析,发现钨镧合金丝的断口主要有四类,分别为杯锥状断口、劈裂断口、缩丝断口及压伤断口。其中杯锥状断口占比最大,主要原因是钨镧合金丝心部有镧、氧富集形成大颗粒氧化镧,拉拔时不能与其他区域协调变形,导致心部裂纹萌生并扩展而断丝;其次是劈裂断口,主要原因是钨镧合金丝非中心位置的钨晶粒粗化,且有氧化镧富集,整体组织不均匀导致断丝;缩丝断口为钨镧合金丝直径缩小承受外力不足而断丝;压伤断口为钨镧合金丝拉拔过程受到刮擦而断丝。Tungsten-lanthanum(W-La)alloy wires are widely used as core wires for diamond wires in silicon wafer cutting.To ensure production quality,continuity,and efficiency,it is critical to control the fracture rate during the wire drawing process.By collecting fractured wires and analyzing their fracture surfaces using scanning electron microscopy(SEM)and energy-dispersive X-ray spectroscopy(EDS),four primary fracture types were identified:cup-cone fractures,cleavage fractures,necking fractures,and mechanical damage fractures.Cup-cone fractures accounted for the majority of cases.These fractures were attributed to the enrichment of lanthanum and oxygen at the core of the W-La alloy wires,forming large La_(2)O_(3) particles.During drawing,these particles hindered coordinated deformation with the surrounding matrix,leading to crack initiation and propagation at the core.Cleavage fractures,the second most common type,resulted from localized coarsening of tungsten grains and La_(2)O_(3) aggregation in non-central regions,causing structural inhomogeneity.Necking fractures occurred due to insufficient diameter reduction tolerance under external stress,while mechanical damage fractures were caused by scratches or abrasion during the drawing process.
关 键 词:钨镧合金丝 杯锥状断口 劈裂断口 缩丝断口 压伤断口
分 类 号:TG146.4[一般工业技术—材料科学与工程]
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