基于悬浮式H型石墨烯的纳机电加速度计设计  

Design of Nano⁃Electromechanical Accelerometers Based on Suspended H⁃Shape Graphene

作　　者：谷妍霞 刘文耀[1,2] 李伟[1,2] 杨泽宇[1] 田昊源 唐军[1,2] 刘俊[1,2] GU Yanxia;LIU Wenyao;LI Wei;YANG Zeyu;TIAN Haoyuan;TANG Jun;LIU Jun(Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement Instrument,North University of China,Taiyuan 030051,China;State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学量子传感与精密测量仪器山西省重点实验室,山西太原030051 [2]中北大学省部共建动态测试技术国家重点实验室,山西太原030051

出　　处：《测试技术学报》2025年第2期138-147,共10页Journal of Test and Measurement Technology

基　　金：国家重点研发计划资助项目(2022YFB3203400);国家自然科学基金资助项目(U21A20141,62273314,51821003)。

摘　　要：石墨烯因超薄的薄膜厚度和优异的电学、机械性能成为纳机电系统领域膜材料的理想选择,在传感领域有极大的应用潜力。现有的二维材料纳机电加速度传感器尽管表现出小体积优势,但器件灵敏度亟需提升。提出了基于悬浮式H型石墨烯-质量块的纳机电加速度谐振器结构,探究了H型石墨烯的特性。仿真了H型石墨烯薄膜尺寸、质量块尺寸对谐振频率的影响,确定了石墨烯谐振器的尺寸。通过梁与质量块交界处的传感动力学分析,解释了谐振器灵敏度提升与应力分布的关联机制。最终,传感器位移灵敏度达到47.30 nm/nN,与体积相同的传统悬浮式石墨烯加速度计相比,不增加质量块尺寸,灵敏度可提高3.76倍,品质因数可提升2.46倍。该设计为加速度计、陀螺仪、位移传感等低成本、高灵敏度、超小型化纳米机械传感器的性能改进提供参考。Graphene,an ultrathin material,features excellent electrical and mechanical properties,making it an ideal candidate for membrane materials in the field of nano-electromechanical systems.It shows great potential for sensing applications.The size of current nano-electromechanical sensors is extremely small,and the primary challenge lies in enhancing device sensitivity.In this work,a novel suspended H-shaped graphene resonator for acceleration is first proposed,and the properties of the H-shape graphene are explored.The effect of the size of H-shape graphene and its mass on frequency and displacement is simu-lated,and the final dimensions of the graphene resonator are designed.The correlation between device sensitivity enhancement and stress distribution is explored by analyzing the sensing dynamics at the beammass interface.Eventually,the displacement sensitivity of the sensor can reach 47.30 nm/nN.Compared with conventional suspended graphene accelerometers,the sensitivity is improved by 3.76 times,and the Q-factor is enhanced by 2.46 times without increasing the size of the proof mass.These findings lay the foundation for the design and manufacture of low-cost,high-sensitivity,miniaturized nanoelectromechanical systems,such as accelerometers,gyroscopes,and displacement sensors.

关 键 词：悬浮石墨烯 力学特性 有限元法 高灵敏加速度计 纳机电系统 

分 类 号：TH741[机械工程—光学工程] TN256[机械工程—仪器科学与技术]