电子级磷酸的结晶精制技术发展现状与研究进展  

Current status and research progress of crystallization technology of electronic grade phosphoric acid

作　　者：董举 余留洋 贾晟哲 史连军 王诗瀚 胡国涛 汤伟伟 王静康[1] 龚俊波[1] DONG Ju;YU Liuyang;JIA Shengzhe;SHI Lianjun;WANG Shihan;HU Guotao;TANG Weiwei;WANG Jingkang;GONG Junbo(State Key Laboratory of Chemical Engineering,School of Chemical Engineering and Technology,Tianjin University,Tianjin 300072,China;State Key Laboratory of Efficient Utilization for Low Grade Phosphate Rock and Its Associated Resources,Guiyang 550016,Guizhou,China;Wengfu(Group)Co.,Ltd.,Guiyang 550000,Guizhou,China)

机构地区：[1]天津大学化工学院,化学工程联合国家重点实验室,天津300072 [2]中低品位磷矿及其共伴生资源高效利用国家重点实验室,贵州贵阳550016 [3]瓮福(集团)有限责任公司,贵州贵阳550000

出　　处：《化工学报》2025年第2期438-453,共16页CIESC Journal

基　　金：中低品位磷矿及其共伴生资源高效利用国家重点实验室开放课题基金项目(2015DQ820763)。

摘　　要：电子级磷酸作为电子工业常用的一种超高纯试剂,广泛应用于大屏幕液晶显示器和超大规模集成电路等微电子工业中的湿法蚀刻和清洗。随着电子元器件加工精度的迭代更新,对电子级磷酸中杂质含量与微粒的要求也在日益提高。综述了电子级磷酸深度净化的常用方法,重点阐述了结晶精制技术在电子级磷酸深度净化中的优势和应用进展,总结了结晶法在磷酸深度净化过程中的杂质包藏与迁移机制,并概述了结晶纯化的过程强化手段。最后,对电子级磷酸结晶精制技术的发展作出了前景展望。As an ultra-high purity reagent commonly used in electronics industry,electronic grade phosphoric acid is widely used in wet etching and cleaning in microelectronics industry such as large-screen liquid crystal display and huge scale integration circuit.With the iterative update of the processing precision of electronic components,the requirements for impurity content and particles in electronic grade phosphoric acid are also increasing.In this paper,the common methods for the deep purification of electronic grade phosphoric acid are reviewed,the advantages and application progress of crystallization refining technology in the deep purification of electronic grade phosphoric acid are emphasized,the mechanism of impurity accumulation and migration in the process of crystallization purification is summarized,and the strengthening means of crystallization purification process is outlined.Finally,the prospect of the development of crystallization refining technology of electronic grade phosphoric acid is presented.

关 键 词：电子级磷酸 电子材料 结晶 纯化 过程强化 

分 类 号：TQ026.5[化学工程]