半导体领域AMHS系统产业发展分析  

Analysis of the Development of the AMHS System Industry in the Semiconductor Field

作　　者：李建慧 沈锦璐 冯国楠 刘超 LI Jian-hui;SHEN Jin-lu;FENG Guo-nan;LIU Chao(China Center for Information Industry Development)

机构地区：[1]中国电子信息产业发展研究院

出　　处：《中国集成电路》2025年第3期12-15,26,共5页China lntegrated Circuit

摘　　要：自动物料搬运系统(Automatic Material Handling System,AMHS)是半导体制造厂的“物流大动脉”,因其自动化、高效率、高稳定性、智能化优势,逐渐成为半导体制造过程中不可或缺一部分。随着半导体技术的不断进步,AMHS系统的作用越来越大,将助力半导体提质增效。本文介绍了AMHS系统在半导体领域的应用及全球市场的主要情况,分析了半导体领域AMHS应用的未来行业趋势。The Automatic Material Handling System(AMHS)is the“main artery of logistics”of semiconductor manufacturing plants.Due to its advantages in automation,high efficiency,high stability,and intelligence,it has increasingly become an indispensable part of the semiconductor manufacturing process.With the continuous advancement of semiconductor technology,the role of the AMHS system is becoming increasingly significant,and it will help to enhance the quality and efficiency of semiconductors.This paper introduces the application of the AMHS system in the semiconductor field and the main situation of the global market,and analyzes the future industry trends of AMHS applications in the semiconductor field.

关 键 词：半导体 AMHS 天车 产业发展 

分 类 号：TN30[电子电信—物理电子学] F426.63[经济管理—产业经济]