负载下U型微电热驱动器形状优化设计  

Shape optimization design of U-shaped micro-electrothermal actuator under load

作　　者：修峰翼 曹云[1] 孔啸宇 聂伟荣[1] 席占稳[1] XIU Fengyi;CAO Yun;KONG Xiaoyu;NIE Weirong;XI Zhanwen(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,china)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《传感器与微系统》2025年第3期80-83,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51805268);中央高校基本科研业务费专项资金资助项目(30920021101)。

摘　　要：针对光纤移动式光开关的应用场景,进行负载下U型微电热驱动器输出位移性能提升的形状优化设计。将电热驱动器的热臂形状改进为阶梯型、贝塞尔曲线型和B样条曲线型,通过改变热臂形状改变了驱动器热臂上的温度分布,从而实现在驱动器不发生热失效的前提下,可以提高驱动器上加载的电压来提高驱动器的负载下输出位移性能。结果表明,改进后驱动器上的温度分布有了明显改善,驱动器负载下的输出位移性能得到有效提升。Aiming at the application scene of optical fiber mobile optical switch,shape optimization design of U-shaped micro-electrothermal actuator is carried out to improve the output displacement performance under load.The shape of the hot arm of the electrothermal actuator is improved to be a ladder shape,a Bezier curve shape and a B-spline curve shape,and the temperature distribution on the hot arm of the actuator is changed by changing the shape of the hot arm,so that the output displacement performance of the actuator under load can be improved by increasing the voltage loaded on the actuator on the premise that the actuator does not have thermal failure.The results show that the temperature distribution on the actuator is improved obviously,and the output displacement performance of the actuator are effectively improved.

关 键 词：微电热驱动器 形状优化 联合仿真 狼群算法 

分 类 号：TP391[自动化与计算机技术—计算机应用技术] TH122[自动化与计算机技术—计算机科学与技术]