Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk  

作　　者：Renjie Tan Yong Xia Xiangguang Han Linya Huang Wendi Gao Chen Jia Ping Yang Qijing Lin Shujiang Ding Chenying Wang Libo Zhao 

机构地区：[1]State Key Laboratory for Manufacturing Systems Engineering,International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System,Xi’an Jiaotong University,710049 Xi’an,China [2]School of Mechanical Engineering,Xi’an Jiaotong University,Xi’an 710049,China [3]School of Instrument Science and Technology,Xi’an Jiaotong University,Xi’an 710049,China [4]Electronic Materials Research Laboratory,Key Laboratory of the Ministry of Education,School of Electronic Science and Engineering,Xi’an Jiaotong University,710049 Xi’an,China [5]Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing,Yantai 265503,China [6]Engineering Research Center of Energy Storage Materials and Devices of Ministry of Education,National Innovation Platform(Center)for Industry-Education Integration of Energy Storage Technology,School of Chemistry,Xi’an Jiaotong University,Xi’an 710049,China

出　　处：《Microsystems & Nanoengineering》2024年第6期133-149,共17页微系统与纳米工程(英文)

基　　金：supported in part by the National Key Research&Development(R&D)Program of China(Grant No.2022YFB3204800);National Natural Science Foundation of China(Grant Nos.U1909221 and 52305615);Chongqing Natural Science Basic Research Project(Grant No.cstc2021jcyj-msxmX0801).

摘　　要：Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing,minimally invasive surgery,and other narrow operating spaces,where currently available commercial sensors cannot meet the requirements because of their large size.In this study,a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3×9.3×0.98 mm was designed,fabricated,and tested.A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams,comb capacitors,and parallel capacitors was employed.A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial crosstalk.The proposed S-shaped beams achieved a large measurement range through stress optimization.The results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical analyses.The test results show that the proposed sensing chip can detect six-axis force/torque separately,with all crosstalk errors less than 2.59%FS.Its force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm,respectively.The sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm)for force and torque detection,respectively.

关 键 词：CROSSTALK SHAPED TORQUE 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]