影响低温共烧陶瓷(LTCC)生瓷材料烧结收缩率的因素及调控方法  

The Influence Factors and Control Methods of Sintering Shrinkage in Low Temperature Co-fired Ceramic(LTCC)Green Tapes

作　　者：海韵 郭恩霞 韩滨 殷先印 那华 吕金玉 刘永华 朱宝京 徐博 祖成奎 HAI Yun;GUO Enxia;HAN Bin;YIN Xianyin;NA Hua;LV Jinyu;LIU Yonghua;ZHU Baojing;XU Bo;ZU Chengkui(China Building Material Academy Co.,Ltd.,Beijing 100024,China)

机构地区：[1]中国建筑材料科学研究总院有限公司,北京100024

出　　处：《玻璃搪瓷与眼镜》2025年第2期1-8,共8页Glass Enamel & Ophthalmic Optics

基　　金：北京市科学技术协会“青年人才托举工程”(BYESS2023435)。

摘　　要：低温共烧陶瓷(Low temperature co-fired ceramic,简称LTCC)技术是实现电子元件高密度集成的主要方式。为了满足小型化和高性能系统应用的需求,作为基板支撑材料的LTCC生瓷,必须具备高质量和一致性。此外,为了确保共烧匹配和对位精度,严格控制生瓷在烧结过程的收缩行为至关重要。从材料和工艺两个方面综述了影响LTCC生瓷材料烧结收缩率的主要因素:包括无机粉体的粒度和形貌、玻璃软化点、粘合剂和增塑剂的比例、流延速度、热压叠片压力、以及烧结曲线等。通过分析生瓷的烧结过程及产生收缩的原因,阐述了各个因素对生瓷质量的影响程度及相应的控制方法,为制备高品质生瓷提供参考。Low temperature co-fired ceramic(LTCC)has become the mainstream method for the high-density integration of electronic components.In order to meet the requirements of miniaturization and high-performance system applications,as the substrate support material,LTCC green tapes must ensure high quality and consistency.Additionally,in order to maintain accurate alignment of different layers,it is necessary to strictly control the shrinkage behavior of the green tape during sintering.The main factors affecting the shrinkage rate of LTCC green tapes from both material and process perspectives were summarized,including the particle size and morphology of inorganic powder,softening point of glass,the proportion of binder and plasticizers,casting speed,pressure of heat pressed laminations,and sintering curve.The sintering process and the reasons for shrinkage of green tapes were analyzed,and the impact of each factors and control methods on the quality of green tapes were discussed,providing reference for the preparation of high-quality green tapes.

关 键 词：低温共烧陶瓷 生瓷 烧结收缩率 影响因素 调控方法 

分 类 号：TQ174.6[化学工程—陶瓷工业]