基于激光干涉测量的高精度机床自动化控制系统设计  

Design of High-Precision Machine Tool Automation Control System Based on Laser Interferometry

作　　者：袁洪超 YUAN Hongchao(Thermal Power Branch,Shandong Haihua Energy Co.,Ltd.,Weifang,Shandong 262737,China)

机构地区：[1]山东海化能源有限公司热力电力分公司,山东潍坊262737

出　　处：《自动化应用》2025年第5期24-26,共3页Automation Application

摘　　要：设计了一种基于激光干涉测量技术的高精度机床自动化控制系统,旨在提升机床加工精度和效率。通过激光干涉仪实时获取运动误差数据,结合多轴伺服控制和神经网络误差补偿,实现纳米级定位精度。结果表明,该系统显著减小了机床误差,提高了生产效率,并具有良好的实时性能。A high-precision machine tool automation control system based on laser interferometry measurement technology has been designed to improve the machining accuracy and efficiency of the machine tool.Real time motion error data is obtained through laser interferometer,combined with multi axis servo control and neural network error compensation,to achieve nanometer level positioning accuracy.The results show that the system significantly reduces machine tool errors,improves production efficiency,and has good real-time performance.

关 键 词：激光干涉测量 机床自动化 误差补偿 纳米级精度 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]