多晶硅生产中活塞压缩机的故障分析及优化策略研究  

Failure analysis and optimization measures of piston compressors in polysilicon production

作　　者：杜俊平 路向飞 杨永刚 DU Junping;LU Xiangfei;YANG Yonggang(Luoyang China Silicon Corporation Ltd,Luoyang 471023,China)

机构地区：[1]洛阳中硅高科技有限公司,河南洛阳471023

出　　处：《有色设备》2025年第1期74-78,共5页Nonferrous Metallurgical Equipment

摘　　要：在多晶硅生产过程中,氢气、氯硅烷等关键工艺气体的加压环节主要依赖于活塞压缩机。本文系统阐述了活塞压缩机的结构特性,并针对某多晶硅生产企业所使用的活塞压缩机在生产中常见3类故障的原因进行了统计和分析,提出了降低压缩介质粉尘量、提高填料密封效率、强化操作管理能力以及优化设备合理选型4个方面的优化措施。实施结果表明,这些措施有效降低了活塞压缩机的故障率,降幅达到83.33%,显著提升了多晶硅生产系统的安全性与稳定性,为生产企业带来了显著的安全效益和经济效益。In the polysilicon production process,the pressurization of key process gases such as hydrogen and chlorosilanes primarily relies on piston compressors.This paper systematically elaborates on the structural characteristics of piston compressors and conducts a statistical and analytical examination of the causes of three common types of failures observed in the piston compressors used by a certain polysilicon production enterprise.Four optimization measures are proposed,including reducing the dust content in the compressed medium,enhancing the efficiency of packing seals,strengthening operational management capabilities,and optimizing the rational selection of equipment.The implementation results demonstrate that these measures have effectively reduced the failure rate of plunger compressors by 83.33%,significantly enhancing the safety and stability of the polysilicon production system,thereby bringing substantial safety and economic benefits to the production enterprise.

关 键 词：多晶硅 活塞压缩机 氯硅烷 故障分析 优化措施 安全效益 经济效益 

分 类 号：TH457[机械工程—机械制造及自动化]