低吸收高均匀合成石英玻璃研究进展  

Research Progress of Synthetic Quartz Glass with Low-Absorption and High-Homogeneity

作　　者：孙绯 刘俊龙 樊明轩 陈祥 周妍希 张寒 SUN Fei;LIU Junlong;FAN Mingxuan;CHEN Xiang;ZHOU Yanxi;ZHANG Han(Hubei Feilihua Quartz Glass Co.,Ltd.,Jingzhou 434000,China;Innovation Center for Special Optical Glass Materials Technology,Jingzhou 434000,China)

机构地区：[1]湖北菲利华石英玻璃股份有限公司,荆州434000 [2]特种光学玻璃材料技术创新中心,荆州434000

出　　处：《玻璃》2025年第3期7-13,共7页Glass

基　　金：国家科技重大专项(项目编号:2024ZD0605400);荆州市科技计划项目(2024AA01)。

摘　　要：低吸收高均匀合成石英玻璃具有极低的羟基含量、金属杂质含量和极佳的光学均匀性,是高功率激光光学和半导体光刻领域的关键材料。通过对国内外低吸收高均匀合成石英玻璃的技术发展现状进行综述,指出了目前与国外产品存在的差距,同时也讨论了低吸收高均匀合成石英玻璃制备方法的区别并介绍了此类产品性能要求及主要应用场景。Low-absorption and high-homogeneity synthetic quartz glass,which has an extremely low hydroxyl content and metal impurity content and excellent optical homogeneity,is a crucial material in the fields of high-power laser optics and semiconductor lithography.In this review,the development status of synthetic quartz glass with low-absorption and high-homogeneity at domestically and internationally is reviewed,and the gap between them and foreign products is pointed out.At the same time,the differences in the preparation methods of low-absorption and high-homogeneity synthetic quartz glass are discussed,and the performance requirements and main application scenarios are introduced.

关 键 词：低吸收 高均匀 合成石英玻璃 制备方法 

分 类 号：TQ171[化学工程—玻璃工业]