预制应力提高大尺寸金刚石抛光成功率  

Prefabricated Stress for Improving Success Rate of Large-size Diamond Polishing

作　　者：安康 张永康 刘鹏 张亚琛 杨志亮 许光宇 李利军 冯旭瑞 吴海平 李鸿 张旭芳 刘峰斌 李成明 AN Kang;ZHANG Yongkang;LIU Peng;ZHANG Yachen;YANG Zhiliang;XU Guangyu;LI Lijun;FENG Xurui;WU Haiping;LI Hong;ZHANG Xufang;LIU Fengbin;LI Chengming(School of Mechanical and Materials Engineering,North China University of Technology,Beijing 100144,China;School of Information Science and Technology,North China University of Technology,Beijing 100144,China;Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China)

机构地区：[1]北方工业大学机械与材料工程学院,北京100144 [2]北方工业大学信息学院,北京100144 [3]北京科技大学新材料技术研究院,北京100083

出　　处：《表面技术》2025年第6期143-151,共9页Surface Technology

基　　金：国家自然科学基金(52102034,U23A2025);北京市教育委员会科学研究计划项目资助(KM202410009010);北方工业大学有组织科研(2023YZZKY12);北方工业大学研究生教育教学改革研究项目(YJS2024JG16)。

摘　　要：目的 验证预制应力方法在抛光大尺寸金刚石膜中的有效性,通过预制应力方法提高大尺寸金刚石膜的抛光成功率。方法 首先,利用拉曼光谱(Raman Shift)、X射线衍射(XRD)对金刚石膜样品进行测试,利用拉曼测试数据在有限元分析中引入金刚石膜残余应力,并通过扫描电子显微镜(SEM)观察了常温黏样抛光致样品开裂的典型断口形貌,结合有限元模拟抛光过程中金刚石膜应力变化揭示了抛光过程中升温引起的应力导致金刚石膜开裂。随后,采用有限元分析模拟了预制应力在金刚石膜中的引入过程及其在抛光过程中对拉应力的抵消作用。研究了黏接温度和夹具厚度对预制应力的影响。结果 在相同夹具厚度下,预制应力随黏样温度升高,呈近似线性增高;在相同黏样温度下,预制应力先随夹具厚度增加而快速增高,夹具厚度达到30 mm后预制应力增长速率变缓,夹具厚度达到50 mm后预制应力逐渐趋向于稳定。通过预制应力方法在夹具厚度50 mm、90℃黏样的条件下成功抛光出直径125 mm的金刚石膜。通过原子力显微镜(AFM)测试抛光过的金刚石膜晶粒内部粗糙度S_a=1nm。结论 研究结果表明,预制应力法能够有效地在金刚石膜中引入压应力,显著提高了大尺寸金刚石膜抛光成功率。In this study,the prefabricated stress method is applied to the diamond polishing process to improve the success rate of large-size diamond polishing. Based on the difference in thermal expansion coefficients between the diamond film and the metal substrate, compressive stress is introduced into the diamond film by high-temperature bonding and cooling process before polishing to offset the tensile stress caused by friction heating up during the polishing process, so as to inhibit the generation and extension of cracks. The work aims to explore and verify the effectiveness of the prefabricated stress method in polishing large-size diamond film, to improve the success rate of large-size diamond polishing, and to provide a new technical way for improving the surface quality and application performance of diamond films. In this study, finite element analysis and experimental methods were used to verify the validity of the prefabricated stress method. The diamond film samples were tested by Raman spectroscopy and phase analysis of X-ray diffraction (XRD), and the Raman test data were used to introduce the residual stress in the diamond film in the finite element analysis. The typical fracture morphology of the sample cracking was observed by scanning electron microscope (SEM) through the polishing of bonded samples at room temperature. Combined with the finite element simulation of the diamond film stress change during the polishing process, it revealed that the stress caused by the friction heating up during the polishing process led to the cracking of the diamond film. Subsequently, finite element analysis was used to simulate the introduction process of prefabricated stress in the diamond film and its offsetting effect on the tensile stress during the polishing process, and the effects of bonding temperature and fixture thickness on the prefabricated stress were investigated. The results of finite element analysis show that under the same fixture thickness, the prefabricated stress increases approximately linearly

关 键 词：CVD金刚石膜 有限元分析 预制应力 大尺寸金刚石膜 金刚石抛光 机械抛光 

分 类 号：TG356.28[金属学及工艺—金属压力加工]