离子刻蚀法铜基异形微结构表面加工及润湿特性研究  

Study on Surface Machining and Wetting Characteristics of Copper-Based Special-Shaped Microstructure by Ion Etching

作　　者：党超 李昊 王小伟 贾力 DANG Chao;LI Hao;WANG Xiaowei;JIA Li(Institute of Thermal Engineering,School of Mechanical,Electronic and Control Engineering,Beijing Jiaotong University,Beijing 100044,China;Beijing Key Laboratory of Flow and Heat Transfer of Phase Changing in Micro and Small Scale,Beijing 100044,China)

机构地区：[1]北京交通大学机械与电子控制工程学院热能工程研究所,北京100044 [2]微细尺度流动与相变传热北京市重点实验室,北京100044

出　　处：《工程热物理学报》2025年第3期938-944,共7页Journal of Engineering Thermophysics

基　　金：国家自然科学基金项目(No.52036001,No.52106069)。

摘　　要：在金属表面加工异形微结构对于制造适用于低表面能工质的疏液表面具有重要意义。本文基于离子束刻蚀工艺,设计了一种异形微结构表面的加工方法。通过实验研究,优化了加工工艺,确定了异形微结构顶部的变形量与扩散焊接压力的关系,得到了液滴在两种排布方式表面润湿特性的变化规律。异形微结构表面可使表面能低至26.72 mN/m的乙醇溶液液滴保持疏液状态。微结构表面上液滴接触角总体随液滴体积增加呈周期性变化规律,随工质表面能的降低逐渐减小。槽道表面可使表面能较低的液滴维持疏液状态,润湿性具有各向异性,点阵表面可使一定体积的液滴拥有更高的接触角和更均匀的润湿性。The machining of special-shaped microstructure on metal surface was of great signifi-cance for the manufacture of hydrophobic surface suitable for low surface energy working fluids.In this paper,a machining method of special-shaped microstructure surface was designed based on ion beam etching process.Through the experimental study,the processing technology was optimized and the relationship between the deformation of the top of the microstructure and the diffusion welding pressure was determined.The wetting characteristics of the droplet with varied surface energy were explored on two types of microstructure surfaces.The special-shaped microstructure surfaces could keep the ethanol solution droplets with surface energy as low as 26.72 mN/m hydrophobic.The droplet contact angle on the microstructure surface varied periodically with the increase of droplet volume and decreased with the decreasing surface energy of the working fluids.The surface with channel structure could maintain the hydrophobic state of the droplets with lower surface energy and the wettability was anisotropic.The surface with array structure could make the droplets of a certain volume had higher contact angle and more uniform wettability.

关 键 词：异形微结构 离子束刻蚀 低表面能工质 疏液表面 

分 类 号：TK123[动力工程及工程热物理—工程热物理]