基于丝网印刷的触觉传感器研究综述  

Review of Screen-Printed Tactile Sensors

作　　者：王一琳 赵佳锋 黄婧雯 温丫丁 王彦[1] 张晓升[1] WANG Yi-lin;ZHAO Jia-feng;HUANG Jing-wen;WEN Ya-ding;WANG Yan;ZHANG Xiao-sheng(School of Integrated Circuit Science and Engineering,University of Electronic Science and Technology of China,Chengdu,Sichuan 611731,China)

机构地区：[1]电子科技大学集成电路科学与工程学院,四川成都611731

出　　处：《电子学报》2025年第1期24-40,共17页Acta Electronica Sinica

基　　金：国家自然科学基金(No.62074029,No.61905035,No.61971108,No.62004029,No.51905554);国家重点研发计划(No.2022YFB3206100);四川省重点研发计划(No.2022JDTD0020,No.2020ZHCG0038);四川省科技计划(No.2020JDJQ0036,No.2019YJ0198,No.2020YJ0015);四川省自然科学基金(No.2022NSFSC1941);中央高校基本科研业务费专项资金(No.ZYGX2019Z002)。

摘　　要：触觉传感器是一种模拟人类触觉感知能力的传感器,能够检测和量化物理接触时产生的机械刺激或热刺激,并将这些信息转化为电信号,使电子系统获得感知触摸的能力,在人机接口、机器人等领域中受到广泛关注.随着纳米技术、材料科学和信息技术的发展,触觉传感器在向着柔性化、小型化的方向发展以适应在复杂曲面和可动表面上的运用.丝网印刷作为一种成熟的平面图形化加工工艺已被广泛应用于柔性电子的加工过程中.由于具备材料选择灵活、加工成本低、生产速度快等特点,丝网印刷在推动触觉传感器大规模应用方面具有巨大的潜力.本文对基于丝网印刷的触觉传感器的研究现状与最新进展进行了综述,从“丝网印刷的作用”、“丝网印刷触觉传感器的原理”和“提高丝网印刷触觉传感器灵敏度的方法”三个方面进行了分析与归纳.通过对文献的综述,总结了基于丝网印刷的触觉传感器制造方法,并揭示了丝网印刷的优势.最后基于丝网印刷触觉传感器所面临的问题和挑战,对其未来发展方向进行了展望,为相关研究提供参考.Tactile sensors are developed to mimic human tactile perception,they are able to detect and quantify mechanical or thermal stimuli generated during physical contact and convert the information into electrical signals,empowering electronic systems the ability to sense touch.So that tactile sensors have attracted significant attention in the fields of human-machine interface and robotics.With the development of nanotechnology,material science and information technology,tactile sensors advance to flexibility and miniaturization in order to adapt to the application on complex curved surfaces and movable surfaces.Screen printing,as a mature planar graphic process,has been widely used in the processing of flexible electronics.Due to the characteristics of flexible material selection,low processing cost and fast production speed,screen printing has great potential in promoting the large-scale application of tactile sensor.In this paper,we review the current research status and recent progress of screen-printed tactile sensors,from the aspects of“the role of screen-printing”,“the mechanism of screen-printed tactile sensors”,and“the methods to improve the sensitivity of screen-printed tactile sensors”.In the first aspect,the roles of screen printing are classified according to the function of the screen-printed part,including printing“conductive layer”,“active layer”,and“structural layer”.In the second aspect,the two types of sensing mechanisms,active and passive sensing,are summarized separately,which further demonstrates the compatibility of the screen-printing process.In the third aspect,four kinds of structures fabricated by screen printing are summarized to show the potential for high sensitivity of screen-printed tactile sensors.As a result of the review,the methods of tactile-sensor fabrication based on screen printing are summarized,and the advantages of screen printing are revealed.Finally,based on the challenges faced by screen-printed tactile sensors,an outlook on the future direction of

关 键 词：触觉传感器 压力传感器 丝网印刷 印刷电子 电子皮肤 有源传感 无源传感 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN605[自动化与计算机技术—控制科学与工程]