传感自控技术在提升扩散均匀性中的应用  

Application of Sensing Self-control Technology in Improving Diffusion Uniformity

作　　者：林韦蔚 韦逢春 闫柏霖 姜利 饶文锐 易险峰[3] LIN Weiwei;WEI Fengchun;YAN Bailin;JIANG Li;RAO Wenrui;YI Xianfeng(Changsha Hongyi High School,Hunan 410023,China;The 48th Research Institute of CETC,Hunan 410009,China;School of Automation,Central South University,Hunan 410083,China)

机构地区：[1]长沙市弘益高级中学,湖南410023 [2]中国电子科技集团公司第四十八研究所,湖南410009 [3]中南大学自动化学院,湖南410083

出　　处：《电子技术(上海)》2024年第12期16-17,共2页Electronic Technology

基　　金：国家重点研发计划(2020YFE0203100);长沙市科技计划(kh2404008)。

摘　　要：阐述针对扩散炉工艺制造均匀性不佳的问题,通过运用智能传感和控制技术,设计石英舟自动传感控制系统,介绍检测所用器件的算法原理。测试验证提升方块电阻均匀性的效果。This paper describes the problem of poor uniformity in the manufacturing process of diffusion furnaces.By using intelligent sensing and control technology,an automatic sensing and control system for quartz ships is designed,and the algorithm principles of the detection devices are introduced.Test and verify the effect of improving the uniformity of block resistance.

关 键 词：智能控制 扩散工艺 方块电阻 均匀性 

分 类 号：TN405[电子电信—微电子学与固体电子学]