基于双内十字定子的压电宏微平面运动台研究  

A Piezoelectric Macro-micro Planar Motion Platform Based on a Dual-inner-cross Stator

作　　者：胡志鹏 李晨捷 潘文强 丁切 贺红林[1] HU Zhipeng;LI Chenjie;PAN Wenqiang;DING Qie;HE Honglin(School of Aeronautical Manufacturing,Nanchang Hangkong University,Nanchang 330063,China)

机构地区：[1]南昌航空大学航空制造工程学院,南昌330063

出　　处：《噪声与振动控制》2025年第2期243-249,共7页Noise and Vibration Control

基　　金：国家自然科学基金资助项目(52165008);江西省自然科学基金重点资助项目(NO.20202ACB202003)。

摘　　要：为满足高精度平面运动的需要,提出一种由双内十字定子驱动的平面运动驱动器。利用定子的面内、面外弯振模态在驱动足处耦合形成的椭圆轨迹,从而推动动子沿x、y方向运动。本文阐述作动器的运行机理,基于ANSYS建立定子有限元模型,优化定子结构尺寸,简并工作模态频率并使其分别为27 457.5、27 704、27 601.3 Hz,进行谐响应分析、瞬态分析和运动调节特性分析。仿真结果表明在激励电压为250 V、频率27 344 Hz时,定子驱动足上x、y、z向振幅分别为1.5、1.4、1.6μm,模拟出椭圆轨迹,对该作动器具有良好的运动特性加以验证,并给出定子的夹持方案,设计出作动器装配结构。To meet the demands of high-precision planar motion,a planar motion actuator driven by dual-inner-cross piezoelectric stator was proposed.The elliptical trajectory formed by coupling the in-plane and out-of-plane bending vibration modes of the stator at the driving foot was utilized to drive the actuator along the x and y directions.The driving principle of the actuator was presented.Based on ANSYS software,the finite element model of the stator was established,the structural dimension was optimized,the modal frequencies were simplified and merged into three frequencies of 27457.5,27704 and 27601.3 Hz.The harmonic response analysis,transient analysis and the motion regulation analysis were carried out.Results of simulation show that under the condition of excitation voltage of 250 V and frequency of 27344 Hz,the measured vibration amplitudes at the driving foot are 1.5,1.4 and 1.6μm in the x,y,and z directions respectively,and the moving speed of the stator reaches 44.6 mm/s.The elliptical trajectory of the stator was simulated and the good kinetic performance of the actuator was verified.Finally,the stator fixing scheme was given,and the assembly structure of the actuator was designed.

关 键 词：振动与波 平面运动驱动器 双内十字式定子 机电耦合模型 动力学分析 

分 类 号：TM3[电气工程—电机]