基于超滤膜的超高纯氨精馏工艺生产技术研究  

Research on Production Technology of Ultra high Purity Ammonia Distillation Process Based on Ultrafiltration Membrane

作　　者：尹建华 梁雄 张云龙 康彦怀 刘永淘 黄广聪 王凯强 YIN Jianhua;LIANG Xiong;ZHANG Yunlong;KANG Yanhuai;LIU Yongtao;HUANG Guangcong;WANG Kaiqiang(Lanzhou Longhua Special Gas Technology Co.,Ltd.,Lanzhou 730030,China;Lanzhou Yulong Gas Co.,Ltd.,Lanzhou 730060,China)

机构地区：[1]兰州隆华特种气体科技有限公司,甘肃兰州730030 [2]兰州裕隆气体股份有限公司,甘肃兰州730060

出　　处：《化工管理》2025年第8期147-149,158,共4页Chemical Management

基　　金：甘肃省科技型中小企业技术创新基金项目“兰州新区特种气体产业化研究与应用”(22CX3GA005)。

摘　　要：文章针对超高纯氨电子气体的制备,开展了基于超滤膜与精馏耦合工艺的研究。采用PVDF中空纤维超滤膜对氨气进行预纯化,通过优化操作压力、温度、料液流速等工艺参数,获得了渗透通量118.5 L/(m^(2)·h)、杂质去除率98%的优异分离效果。超滤产出的高纯氨经50塔板精馏塔进一步提纯,在优化的精馏操作条件下,最终得到纯度高达99.999993%的超高纯氨产品,各项杂质指标均优于SEMI标准。文章为超高纯氨的规模化制备提供了一条高效、环保的新工艺路线。This paper focuses on the preparation of ultra-high-purity ammonia electronic gas through a coupled process of ultrafiltration membrane and distillation.The pre-purification of ammonia gas was carried out using a PVDF hollow fiber ultrafiltration membrane.By optimizing operational parameters such as pressure,temperature,and feed flow rate,an excellent separation performance was achieved with a permeate flux of 118.5 L/(m^(2)·h)and a contaminant removal rate of 98%.The highpurity ammonia produced by ultrafiltration was further purified in a 50-plate distillation column.Under optimized distillation conditions,ultra-high-purity ammonia with a purity of 99.999993%was obtained,with all impurity indicators exceeding SEMI standards.This paper provides an efficient and environmentally friendly new process route for the large-scale production of ultra-high-purity ammonia.

关 键 词：超高纯氨 超滤膜 精馏 电子气体 

分 类 号：TQ113.26[化学工程—无机化工]