精密主动减振平台多陷波滤波器设计方法研究  

Notch Filter Addition for Vibration Isolation Table Flexibility Suppression

作　　者：俞开程 孙煜 程文宝 杨晓峰 Yu Kaicheng;Sun Yu;Cheng Wenbao;Yang Xiaofeng(School of Microelectronics,Fudan University,Shanghai 200433,China;Academy for Engineering and Technology,Fudan University,Shanghai 200433,China)

机构地区：[1]复旦大学微电子学院,上海200433 [2]复旦大学工程与应用技术研究院,上海200433

出　　处：《动力学与控制学报》2025年第1期41-48,共8页Journal of Dynamics and Control

基　　金：国家自然科学基金资助项目(62304045);上海市扬帆计划资助项目(23YF1401600)。

摘　　要：随着先进半导体装备的精度不断提高,环境振动对精密装备的影响日益增大.主动隔振技术广泛应用于精密设备中,可对低频振动进行有效隔振.为了进一步提高隔振效果,主动隔振系统的控制带宽逐步提高,柔性模态对系统整体性能的限制随之逐渐体现.在工程上,通常采用二阶陷波滤波器抑制柔性模态引起的谐振峰.面对实际系统中多个柔性谐振峰叠加的现象,传统滤波器设计方式面临着参数复杂,耗时长,抑制效果不佳并且引起的相位损失大等问题.本文根据二阶陷波滤波器的幅频特性,采用简易的参数设计方式,设计简单耗时短.提出的陷波滤波器添加方式能够针对柔性谐振峰进行精准抑制的同时引起的相位损失更小,有利于实现较大的系统带宽,从而提升控制效果.As the precision of advanced semiconductor equipment continues to improve,the impact of environmental vibration on precision equipment is increasing.Active vibration isolation technology is widely used in precision equipment to effectively isolate low-frequency vibration.In order to further improve the vibration isolation effect,the control bandwidth of the active vibration isolation system is gradually increased,and the limitation of flexible modes on the overall performance of the system is gradually reflected.In engineering,the resonance peaks caused by flexible modes are usually suppressed by second-order notch filters.Faced with the phenomenon of multiple flexible resonant peaks superimposed in the actual system,the traditional filter design faces the problems of complex parameters,long time consuming,poor suppression effect and large phase loss,etc.In this paper,the second-order notch filter is used to suppress the resonant peaks caused by flexible modes.Meanwhile,based on the amplitude-frequency characteristics of the second-order notch filter,a new parametric design method is adopted,which is simple and time-consuming.The proposed notch filter can accurately suppress the flexible resonance peaks while causing less phase loss,which is conducive to realizing a larger system bandwidth and thus improving the control effect.

关 键 词：主动隔振 柔性谐振峰 陷波滤波器 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置] TH113[自动化与计算机技术—控制科学与工程]