面向MEMS谐振加速度计灵敏度提升的梯形微杠杆优化研究  

Research on Optimization of Trapezoidal Microlever for Sensitivity Enhancement of MEMS Resonant Accelerometer

作　　者：赵文胜 李挺 李蓉 何江波 周吴 ZHAO Wensheng;LI Ting;LI Rong;HE Jiangbo;ZHOU Wu(School of Mechanical Engineering,Xihua University;School of Mechanical and Electrical Engineering,University of Electronic Science and Technology of China)

机构地区：[1]西华大学机械工程学院 [2]电子科技大学机械与电气工程学院

出　　处：《仪表技术与传感器》2025年第2期11-15,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金(52205604,52075082);四川省自然科学基金(2022NSFSC2013);教育部春晖计划合作科研项目(182559)。

摘　　要：灵敏度影响微机电系统(MEMS)谐振加速度计精度。针对传统矩形微杠杆宽度较大会导致灵敏度损失的问题,提出并优化了一种梯形微杠杆。首先介绍了带有梯形微杠杆的MEMS谐振加速度计的工作原理和结构特点。再以灵敏度为目标函数,基于有限元方法建立了梯形微杠杆的优化模型,包含2个步骤:第1步,建立了以支点梁位置及支点梁、输出梁和输入梁的长度为变量的灵敏度优化模型,优化结果使灵敏度达到272.9 Hz/g;第2步,以第1步得到的优化尺寸为基础,对杠杆臂的梯形形状进行优化,使灵敏度提高到302.4 Hz/g。优化得到的单位质量块面积对应的灵敏度达到42.7 Hz/(g·mm^(2)),因此通过梯形微杠杆优化可以在紧凑空间内实现高灵敏度。Sensitivity affects the precision of microelectromechanical system(MEMS)resonant accelerometer.Addressing the problem of sensitivity loss caused by the large width of traditional rectangular microlever,a trapezoidal microlever was pro-posed and optimized.Initially,the principle and structural feature of the MEMS resonant accelerometers with trapezoidal mic-rolevers was described.Then,a sensitivity optimization model with two steps was established for the trapezoidal microlever based on finite element method.In the first step,a sensitivity optimization model with the position of the pivot beam and the width of the pivot,output,and input beams as variables was established,and the optimized sensitivity reached 272.9 Hz/g.In the second step,based on the optimized dimensions obtained in the first step,the trapezoidal shape optimization for the microlevers arm was implemented to further improve the sensitivity to 302.4 Hz/g.The optimized sensitivity per area of the proof mass is 42.7 Hz/(g·mm^(2)).Therefore,the optimization of the trapezoidal microlever can achieve high sensitivity in a compact space.

关 键 词：微机电系统 谐振加速度计 梯形微杠杆 灵敏度 结构优化 

分 类 号：TH824.4[机械工程—仪器科学与技术]