MEMS高温压力传感器复合金属层可靠性研究  

Research on Reliability of Composite Metal Layer of MEMS High-temperature Pressure Sensor

作　　者：杜康乐 雷程[1] 梁庭[1] 肖楚译 王旦旦 罗后明 DU Kangle;LEI Cheng;LIANG Ting;XIAO Chuyi;WANG Dandan;LUO Houming(Key Laboratory of Micro/nano Devices and Systems,Ministry of Education,North University of China)

机构地区：[1]中北大学微纳器件与系统教育部重点实验室

出　　处：《仪表技术与传感器》2025年第2期22-27,共6页Instrument Technique and Sensor

基　　金：国家重点研发计划(2023YFB3208500);山西省重点研发计划(2023020302010);山西省科技重大专项计划“揭榜挂帅”项目(202201030201010);中央引导地方科技发展资金项目(YDZJSX20231B006)。

摘　　要：为解决MEMS压力传感器因复合金属层形貌翘曲导致高温失效分析后出现失效的问题,文中提出了3种制备复合金属层的工艺方法,经过逐步模拟键合过程,观察每增加一步工艺对应复合金属层的形貌,通过场发射扫描电子显微镜观察复合金属层的形貌,最后在300℃、保持100 h高温条件下验证传感器的可靠性。采用常温溅射—光刻图形—IBE刻蚀制备出的复合金属层形貌完整且分层明显,模拟键合实验后复合金属层依然未出现翘曲现象,经300℃高温考核后,传感器零位输出稳定在4.5 mV左右,零点漂移为0.906%,时漂约为7.76μV/h,验证了该方案在高温失效分析下的可行性。In order to solve the problem of failure of the composite metal layer after high temperature assessment caused by warping of the morphology of the composite metal layer in the MEMS pressure sensor,three process methods for preparing the composite metal layer were proposed,after simulating the bonding process step by step,observing the morphology of the composite metal layer corresponding to each additional step of the process,the morphology of the composite metal layer was observed by field emission scanning electron microscopy,and finally the reliability of the sensor was verified under the high temperature conditions of 300℃and for keeping 100 h.The composite metal layer prepared by sputtering,photolithography and IBE etching at normal temperature had complete morphology and obvious stratification,and the composite metal layer still did not appear warping phe-nomenon after simulated bonding experiment.After the 300℃ high temperature assessment,the zero output of the sensor is stable at-4.5 mV,the zero drift is 0.906%,and the time drift is about 7.76μV/h,which verifies the feasibility of the scheme under high temperature assessment.

关 键 词：MEMS压力传感器 复合金属层 翘曲 高温考核 模拟键合过程 常温溅射 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]