一种低频高灵敏度压电MEMS声接收器设计  

Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver

作　　者：王登攀 黄晶[1,2,3] 赵德锋 王飞 王露 刘文怡 苗晋威[1,2,3] 张立宇 袁宇鹏 胡义东 WANG Dengpan;HUANG Jing;ZHAO Defeng;WANG Fei;WANG Lu;LIU Wenyi;MIAO Jinwei;ZHANG Liyu;YUAN Yupeng;HU Yidong(Academy of Chips Technology,China ElectronicsTechnology Group,Chongqing 401332,China;NIICAS(Chongqing)Technology Co.,Ltd,Chongqing 401332,China;The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Yunnan Radio Co.,Ltd.,Kunming 650223,China)

机构地区：[1]中国电科芯片技术研究院,重庆401332 [2]国知创芯(重庆)科技有限公司,重庆401332 [3]中国电子科技集团公司第二十六研究所,重庆400060 [4]云南无线电有限公司,云南昆明650223

出　　处：《压电与声光》2025年第1期28-31,58,共5页Piezoelectrics & Acoustooptics

摘　　要：为了提高低频段的灵敏度,基于ScAlN薄膜设计了一种开缝式低频高灵敏度MEMS声传感器结构,并分析了开缝数量对谐振频率和电压输出的影响规律。制作微机电系统(MEMS)声接收器样品,当谐振频率为29.3 kHz时,在20~30 kHz内测得其最高灵敏度高于-60 dB,说明所提出的开缝式结构能在低频段实现高灵敏度。To enhance the sensitivity in the low-frequency range,a slotted low-frequency high-sensitivity microelectromechanical systems(MEMS)acoustic sensor structure was designed based on scandium aluminum nitride(ScAlN)piezoelectric films.The influence of the number of slots on the resonant frequency and voltage output was analyzed.A MEMS acoustic receiver with a resonant frequency of 29.3 kHz was fabricated.The highest sensitivity measured within the frequency range of 20-30 kHz exceeded-60 dB,indicating that the slotted structure proposed in this paper could achieve high sensitivity in the low-frequency range.

关 键 词：压电薄膜 微机电系统(MEMS) 声接收器 

分 类 号：TN384[电子电信—物理电子学] TN64[机械工程—仪器科学与技术] TH765[机械工程—精密仪器及机械] P412.13[天文地球—大气科学及气象学]