传统光栅制备技术及非晶合金光栅制备研究进展  

Research Progress of Traditional Grating Preparation Technology and Amorphous Alloy Grating Preparation

作　　者：李春燕[1,2,3] 张亦舒 侯少杰 李春玲 李晓诚[1,2] 寇生中[1,2,3] Li Chunyann;Zhang Yishu;Hou Shaojie;Li Chunling;Li Xiaocheng;Kou Shengzhong(State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals,Lanzhou University of Technology,Lanzhou 730050,China;School of Materials Science and Engineering,Lanzhou University of Technology,Lanzhou 730050,China;Wenzhou Engineering Institute of Pump&Valve,Lanzhou University of Technology,Wenzhou 325105,China;School of Mechanical and Electrical Engineering,Lanzhou University of Technology,Lanzhou 730050,China)

机构地区：[1]兰州理工大学省部共建有色金属先进加工与再利用国家重点实验室,甘肃兰州730050 [2]兰州理工大学材料科学与工程学院,甘肃兰州730050 [3]兰州理工大学温州泵阀工程研究院,浙江温州325105 [4]兰州理工大学机电工程学院,甘肃兰州730050

出　　处：《稀有金属》2024年第12期1766-1780,共15页Chinese Journal of Rare Metals

基　　金：国家自然科学基金项目(52261032,51861021,51661016);甘肃省科技计划项目(21YF5GA074,20YF8GA052);浙江省基础公益研究计划项目(LGG22E010008);温州市基础公益科研项目(G2023020)资助。

摘　　要：随着科技的飞速发展,越来越多的科学研究聚焦于微型领域,设计和制造的产品尺寸也越来越小,甚至达到了微纳米尺度。当物体的尺寸达到微纳米级别后,其光学性能会发生明显改变,对光的吸收和传输等特性都会产生极大的影响。光栅作为微纳元件的一种,有许多优异的特性,如分束、偏振、色散、相位等,是重要的光学器件。因此,被广泛应用于光通信技术、激光器、诊断测量等众多领域。伴随着科学技术的发展,人类对光栅的要求也不断的提高。基于此,研究学者们对光栅的加工工艺及其所用材料展开了一系列研究。介绍了光栅的定义、分类以及应用等,综述了传统光栅的制备技术和利用非晶合金制备光栅的研究现状及尚未解决的科学问题,并对非晶合金光栅未来的发展机遇与挑战进行了展望。为非晶合金在微机电系统领域的应用提供了理论基础,对推动非晶合金这一新型材料的工程化应用有重要的理论和实际意义。The feature size of micro-optical elements is typically on the order of microns or nanometers.Due to the development of micro-and nano-detection and test systems for industrial,commercial and civil applications in the last decade,researchers have conducted detailed and in-depth studies on increasingly miniaturized and integrated micro-optical components and systems,and the rapidly developing microelectronic manufacturing processes have contributed to the design,fabrication and application of micro-optical components.As a used basic optical element,optical grating consists of a large number of equal-width,equally spaced slits arranged periodically,and has four basic functions of dispersion,beam splitting,polarization and phase matching.Although the classical concept of diffraction grating is simple,its connotation is extremely rich.Over the years,gratings have been used for much more than their traditional applications,becoming irreplaceable and important components in many fields of technology.For example,gratings are used in integrated optics,optical holography,spectral analysis,fuzzy processing,digital-to-analog conversion correlation storage,beam coupling,beam sampling,beam splitting,data storage optical testing,bit-phase co-choking,mode-locking,signal processing,solar focused spatial light modulation,optical switching,diagnostic measurements,image recognition,and many more,while gratings continue to be used in new areas.With the development of science and technology,the requirements for grating are constantly improving.At present,many micro-opto-mechanical systems containing optical components are developing toward miniaturization,integration and arraying,so the size of many optical components is also reduced,such as micro-lens arrays,micro-nano gratings,etc.Therefore,the use of new materials for grating preparation and the development of new grating preparation techniques are crucial.Metallic glass has generated a great deal of research,while creating an increasing number of new opportunities for various bas

关 键 词：光栅 非晶合金 表面图案化 衍射效率 

分 类 号：TG139.8[一般工业技术—材料科学与工程]