组分掺杂对YbF_(3)薄膜材料光学和理化特性的影响及其在红外光学薄膜元件制备中的应用  

The effect of doping on the optical and physicochemical properties of YbF_(3)and its application in infrared coatings

作　　者：马秋静 段微波[1,3] 于天燕 李大琪[1] 余德明[1] 刘保剑[1] 庄秋慧 刘定权 MA Qiu-Jing;DUAN Wei-Bo;YU Tian-Yan;LI Da-Qi;YU De-Ming;LIU Bao-Jian;ZHUANG Qiu-Hui;LIU Ding-Quan(Shanghai Key Laboratory of Optical Coatings and Spectral Modulation,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China;College of Mechanical Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]中国科学院上海技术物理研究所,上海市光学薄膜与光谱调控重点实验室,上海200083 [2]中国科学院大学,北京100049 [3]重庆理工大学机械工程学院,重庆400054

出　　处：《红外与毫米波学报》2025年第1期86-96,共11页Journal of Infrared and Millimeter Waves

基　　金：国家重点研发计划(2021YFB3701500)。

摘　　要：本文研究了沉积方式及氟化钙(CaF_(2))的掺杂对氟化镱(YbF_(3))薄膜材料光学和理化特性的影响。分别使用电子束蒸发工艺和电阻蒸发工艺,制备了纯YbF_(3)薄膜及掺杂不同比例CaF_(2)的YbF_(3)薄膜,通过光谱测量、应力测量、X射线衍射(XRD)、原子力显微镜(AFM)等测试方式对单层膜样品进行了表征,并使用经典洛伦兹谐振子色散模型对其进行光学常数拟合。结果表明,在采用电子束蒸发工艺、CaF_(2)掺杂比例为1%的条件下,获得了光学和理化性能较好的单层膜。在该条件下,设计和制备了长波红外减反射膜系,并对其进行了光谱表征和可靠性测试,结果表明其在长波红外区的透过率达到99%以上,可靠性达到空间红外光学薄膜相关标准要求。The effects of calcium fluoride(CaF_(2))doping on the optical,physical and chemical properties of Ytterbium fluoride(YbF_(3))materials were studied.Pure YbF_(3)thin films and YbF_(3)thin films doped with different proportions of CaF_(2)were deposited by electron beam and thermal evaporation,respectively.The characteristics of single layer were measured by spectrometer,stress measurement system,X-ray Diffraction(XRD),Atomic Force Microscope(AFM)and other measuring devices.The optical constants were fitted by the classical Lorentz oscillator model.The results show that the single-layer film with better optical,physical and chemical properties is obtained by electron beam deposition,in the condition of 1%CaF_(2)doping.A long-wave infrared anti-reflection multi-layer sample was designed and fabricated and its spectrum and reliability test were carried out.The results show that its transmittance in the long-wave infrared region is as high as 99%,and the reliability meets the requirements of space application.

关 键 词：红外 光学薄膜 氟化镱 掺杂 增透 

分 类 号：O484.5[理学—固体物理]