真空等离子清洗源机械结构设计优化与研究  

Optimization and Research on Mechanical Structure Design of Vacuum Plasma Cleaning Source

作　　者：顾凤杰 GU Fengjie(Fei Mian Instrument Technology(Shanghai)Co.,Ltd.,Shanghai 201900,China)

机构地区：[1]费勉仪器科技(上海)有限公司,上海201900

出　　处：《机械工程与自动化》2025年第2期205-207,共3页Mechanical Engineering & Automation

摘　　要：为了提升清洗效能并降低能耗与维护成本,针对真空等离子清洗源机械结构进行优化。利用系统辨识技术对清洗源关键组件进行建模,进而对电极配置和热管理策略进行了创新设计。测试装置采用06Cr19Ni10不锈钢材质,配合可调式的射频电源和高效水冷系统,优化了设备温度控制。实验结果表明:优化后的机械结构在连续运行60min后,内部温度升高且有效控制在5%以内,清洗效能提升25%,等离子体覆盖均匀性提高30%。该优化方案有效增强了清洗源的工艺性能和设备可靠性。This study focuses on the optimization of the mechanical structure of vacuum plasma cleaning sources,aiming to improve cleaning efficiency and reduce energy consumption and maintenance costs.The key components of the cleaning source were modeled using system identification technology,,and innovative designs were made for electrode configuration and thermal management strategies.The testing device is made of 06Cr19Ni10 stainless steel material,combined with an adjustable RF power supply and an efficient water cooling system,to optimize the temperature control of the equipment.The experiment results showed that after continuous operation for 60 minutes,the internal temperature of the optimized mechanical structure increased and was effectively controlled within 5%,resulting in a 25% improvement in cleaning efficiency and a 30% improvement in plasma coverage uniformity.The optimization scheme of this study effectively enhances the process performance and equipment reliability of the cleaning source.

关 键 词：等离子清洗 机械结构 优化电极材料 热管理 

分 类 号：TH112[机械工程—机械设计及理论]