基于F-P腔的大孔径MEMS滤波器设计  

Design of large aperture MEMS filter based on F-P cavity

作　　者：孙创 王思亮 王鹏 王文婧 SUN Chuang;WANG Siliang;WANG Peng;WANG Wenjing(School of Integrated Circuits,Anhui University,Hefei 230601,China;Anhui North Microelectronics Research Institute Group Corporation Limited,Bengbu 233017,China)

机构地区：[1]安徽大学集成电路学院,安徽合肥230601 [2]安徽北方微电子研究院集团有限公司,安徽蚌埠233017

出　　处：《传感器与微系统》2025年第4期119-122,127,共5页Transducer and Microsystem Technologies

基　　金：安徽省高校协同创新项目(GXXT-2022-080)。

摘　　要：基于微机电系统(MEMS)技术,设计了一种大孔径的微型F-P腔可调谐滤波器光机敏感结构。器件结构采用折叠悬臂梁设计,在中波红外(3~5μm)光谱范围内实现了通光区域为2 mm×2 mm滤波器件的调谐。通过进行调谐位移、结构应力和平整度分析,完成器件结构的仿真研究。结果表明:在中波范围内,该结构的调谐位移为0.83μm,最大驱动电压为13 V,最大倾斜角为0.0021°。同时,采用高低折射率交替的方法,设计了一种多层介质的高反膜,平均反射率达到90.52%,可实现高精度的滤波效果。Based on MEMS technology,a kind of optical machine sensitive structure of micro F-P cavity tunable filter with large aperture is designed.The device structure is designed with a folded cantilever beam and realize the tuning of the filtering element in the mid-wave infrared spectrum range of 3~5μm with an optical transmission region of 2 mm×2 mm.Through the analysis of tuning displacement,structural stress and flatness,the device structure is simulated.The results show that the tuning displacement of the structure is 0.83μm,the maximum driving voltage is 13 V,and the maximum tilt angle is 0.0021°in the range of medium wave.At the same time,a multi-layer high reflection film is designed by using the method of high and low refractive index alternating,and the average reflectance reaches 90.52%,which can achieve high-precision filtering effect.

关 键 词：微机电系统 大孔径 法布里-珀罗腔 可调谐滤波器 折叠悬臂梁 高反膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN713[自动化与计算机技术—控制科学与工程]