纳米线热导率测量系统的设计与测试  

Design and testing of nanowire thermal conductivity measurement system

作　　者：杜夏瑢 熊心怡 张玉东 王文[1,2] 卫荣汉 DU Xiarong;XIONG Xinyi;ZHANG Yudong;WANG Wen;WEI Ronghan(School of Mechanics and Safety Engineering,Zhengzhou University,Zhengzhou 450001,China;Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application,Zhengzhou 450001,China;Industrial Technology Research Institute,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州大学力学与安全工程学院,河南郑州450001 [2]河南省微机电系统制造与应用工程技术研究中心,河南郑州450001 [3]郑州大学产业技术研究院,河南郑州450001

出　　处：《传感器与微系统》2025年第4期148-150,155,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(52171193)。

摘　　要：随着微纳器件尺寸减小和内部纳米线密度增加,积热问题成为限制器件寿命的关键因素。准确测量纳米线的热传导特性对改善微纳器件的散热具有重要意义。本文以改进的稳态焦耳加热法和电阻检温法为基础,推导了纳米线热导率的测量理论,并搭建了可以准确测量不同温度下悬空纳米线热导率的测试系统。该系统利用温度传感器和真空计实时监测样品腔内的温度和真空度,通过PID控制系统对腔内温度和真空度进行精确调节,最终,实现对不同温度下不同形状悬空纳米线热导率的准确测量。As the size of micro and nanodevices decreases and the density of internal nanowires increases,the heat accumulation in the devices becomes a key factor limiting the lifetime of the devices.Accurate measurement of the heat conduction characteristics of nanowires is important for the improvement of heat dissipation of micro and nanodevices.The measuring theory of the thermal conductivity of nanowires is derived based on the improved steady-state Joule heating method and the resistive temperature testing method,and measurement system that can accurately measure the thermal conductivity of suspended nanowires at different temperatures is constructed.The system uses temperature sensors and vacuum to monitor the temperature and vacuum in the sample cavity in real-time.The temperature and vacuum in the cavity are precisely adjusted by PID control system.Finally,accurate measurement of the thermal conductivity for different shapes of suspended nanowires is achievd at different temperatures.

关 键 词：热导率 温度传感器 真空计 悬空纳米线 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置] V231.1[自动化与计算机技术—控制科学与工程]