十字型微谐振梁振型分析  

Analysis of Vibration Mode of Cross Shaped Micro Resonant Beam

作　　者：韩光 李智 查天任 张秀礼[1,2] 孙博 陆向辉 齐有军[1] 赵克宝 凤祥云[1,2] Han Guang;Li Zhi;Zha Tianren

机构地区：[1]河北建材职业技术学院,河北秦皇岛066004 [2]河北省建筑材料绿色智造应用技术协同创新中心,河北秦皇岛066004

出　　处：《机械制造》2025年第3期36-40,共5页Machinery

基　　金：河北省高等学校科学技术研究项目(编号:QN2024251)。

摘　　要：谐振式传感器具有高精度与高稳定性等显著优势,在众多领域得到广泛应用。针对谐振式传感器振动元件在实际应用中的需求,提出一种具有新型微梁结构的振动元件——十字型微谐振梁。利用光刻技术加工谐振梁样件,建立两端固定约束且中部带有集中质量的振动微分方程,进行振型分析。利用拉普拉斯变换,对谐振梁振动微分方程进行求解,得到谐振梁各阶特征值,进一步推导出对应振型函数,绘制振型图像,分析谐振梁不同阶次的振型特征。考虑时间函数对系统的影响,计算得到谐振梁各点随时间变化的动态位移,从而揭示谐振梁动态特性。The resonant sensor has significant advantages such as high precision and high stability,and is widely used in many fields.A new type of vibration element with micro beam structure-the cross shaped micro resonant beam was proposed to meet the practical application need of resonant sensor vibration element.The vibration differential equation with fixed constraints at both ends and concentrated mass in the middle was established to perform vibration mode analysis by using photolithography technology to process resonant beam sample.The Laplace transform was used to solve the vibration differential equation of the resonant beam,and the characteristic value of each order of the resonant beam was obtained,further the corresponding vibration mode function was derived,and the mode image was drawn to analyze the mode characteristics of the resonant beam at different orders.Considering the influence of time function on the system,the dynamic displacement of each point of the resonant beam over time was calculated to reveal the dynamic characteristic of the resonant beam.

关 键 词：谐振梁 振型分析 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]