二维层状氧化锌纳米片的制备与压电性能表征  

Preparation and characterization of two-dimensional layered ZnO nanosheets with ultra-high piezoelectric coefficient

作　　者：刘鸿凯 何文远[1] 彭金峰[1] 郑学军[1] LIU Hongkai;HE Wenyuan;PENG Jinfeng;ZHENG Xuejun(School of Mechanical Engineering and Mechanics,Xiangtan University,Xiangtan 411105,Hunan,China)

机构地区：[1]湘潭大学机械工程与力学学院,湖南湘潭411105

出　　处：《实验力学》2025年第1期134-142,共9页Journal of Experimental Mechanics

基　　金：国家自然科学基金重点项目(11832016,12002295);合肥通用机械研究院有限公司项目(20213 ZK 2021010483)。

摘　　要：二维材料因具有高导电性、光学透明性和机械强度等特性,其压电和压电光电子效应近年来越来越受到关注;为了促进二维材料在微机电系统、纳米机器人和有源柔性电子产品领域的实际应用,开展二维材料的压电性能研究具有重要意义。本文采用原子力显微镜(AFM)对二维层状氧化锌(ZnO)纳米片的反常离面压电效应进行探究。首先,通过化学气相沉积法合成ZnO单晶微米线,将其进行超声剥离制备成二维层状ZnO纳米片;然后利用扫描电子显微镜和透射电子显微镜对ZnO单晶微米线的微观结构、晶体结构和生长取向进行表征;再通过AFM的PFM模块测得二维层状ZnO纳米片振幅-偏置电压类“蝴蝶”曲线和压电系数-偏置电压滞回曲线。结果表明:ZnO单晶微米线具有沿厚度取向[0001]方向的单晶纤锌矿结构;二维层状ZnO纳米片厚度小于10 nm,同样具有厚度取向为[0001]方向的单晶纤锌矿结构,离面有效压电系数最大可达到48.4 pm/V。Two-dimensional(2D)materials have many remarkable properties such as high conductivity,optical transparency and mechanical strength,their piezoelectric and piezoelectric photoelectron effects have attracted more attention,and the study of piezoelectric properties of two-dimensional materials is of great significance for the application of microelectromechanical systems,nanorobots,and active flexible electronic products.In this paper,atomic force microscopy(AFM)was used to investigate the anomalous off-plane piezoelectric effect of two-dimensional layered zinc oxide(ZnO)materials.First,ZnO single crystal microwires were synthesized by chemical vapor deposition,and then they were exfoliated by ultrasonic exfoliation to obtain two-dimensional layered ZnO nanosheets.Subsequently,the microstructure,crystal structure and growth orientation of ZnO single crystal microwires were characterized by scanning electron microscopy,transmission electron microscopy and EBSD.Then,the amplitude-bias voltage butterfly-like curve and the piezoelectric coefficient-bias voltage hysteresis curve were measured by the PFM module of AFM for two-dimensional layered ZnO nanosheets.The results show that ZnO single crystal microwires have a single-crystal wurtzite structure grown along the thickness orientation[0001].Two-dimensional layered ZnO nanosheets are of less than 10 nm thick,also have a single-crystal wurtzite structure grown along the thickness orientation[0001],and the effective out-of-plane piezoelectric coefficient can reach a maximum of 48.4 pm/V.

关 键 词：化学气相沉积法 超声剥离法 二维层状ZnO纳米片 单晶生长 离面压电系数 

分 类 号：O631[理学—高分子化学]