基于图像识别算法的金刚石表面飞秒激光损伤阈值自动测量方法  

Automatic Measurement of Femtosecond Laser Damage Threshold on Diamond Surface Based on Image Recognition Algorithm

作　　者：张大琪 钟云 陈涛[1] 张雨 师宇斌 司金海[1] 侯洵[1] ZHANG Daqi;ZHONG Yun;CHEN Tao;ZHANG Yu;SHI Yubin;SI Jinhai;HOU Xun(Key Laboratory of Electronic Physics and Devices,Ministry of Education,School of Electronic Science and Engineering,Xi′an Jiaotong University,Xi′an 710049,China;State Key Laboratory of Laser-matter Interaction,Northwest Institute of Nuclear Technology,Xi′an 710024,China)

机构地区：[1]西安交通大学电子科学与工程学院电子物理与器件教育部重点实验室,西安710049 [2]西北核技术研究院激光与物质相互作用国家重点实验室,西安710024

出　　处：《光子学报》2025年第3期94-106,共13页Acta Photonica Sinica

基　　金：激光与物质相互作用全国重点实验室基金课题项目(No.SKLLIM2202)。

摘　　要：针对金刚石等材料表面激光损伤阈值测量的需求,提出基于图像识别算法的飞秒激光损伤阈值自动测量方法。通过对损伤结构的显微图像灰度化、二值化、傅立叶滤波去噪结合损伤区域边界自动提取算法实现损伤结构的自动识别和其面积的自动测量,进一步拟合损伤面积与激光功率对数曲线然后外推获得损伤阈值。利用该方法测量出单晶金刚石50 fs飞秒激光单脉冲表面损伤阈值为3.1 J/cm^(2),微晶金刚石薄膜单脉冲损伤阈值为0.55 J/cm^(2)。该方法显著提升了材料飞秒激光损伤阈值的测量效率和精度,降低了测量成本,在金刚石等硬脆材料的飞秒激光加工技术、抗激光损伤特性等研究中具有潜在的应用价值。Hard and Brittle Materials(HBMs)such as diamond,sapphire,and quartz glass are employed in many applications within the aerospace,military,integrated circuits,biomedicine,and optoelectronic devices sectors.This is due to their high hardness,high thermal stability,chemical inertness,and excellent optoelectronic properties.In particular,hard and brittle materials play an indispensable role in the extreme environment of strong radiation and easy corrosion.Moreover,due to its high hardness and chemical inertness,employing traditional processing techniques to fabricate micro-nano structures is challenging.The pulse duration of femtosecond lasers is significantly shorter than the time scale of electron-lattice interaction,which enables the preparation of micro-nano-structures in a nearly heat-affected region.The existence of the femtosecond Laser Damage Thresholds(LDT)effect enables the spatial resolution of laser processing of hard and brittle materials to be greatly enhanced.Consequently,the study of the LDT of materials is of great significance,as it allows the spatial resolution of femtosecond laser processed materials to be enhanced and provides a reference for the processing scheme.There are three principal methods for obtaining LDT the direct measurement method,the model calculation method and the extrapolation method.The direct measurement method is well-suited to initial material LDT testing due to its simplicity of operation and the ability to obtain data quickly.However,the LDT of the material is related to the parameters of the laser,such as wavelength,pulse width,repetition frequency and the type of focusing objective of the laser process,which requires a significant amount of measurement work.Furthermore,the presence of local defects or inhomogeneities in the material can lead to early damage,introducing uncertainty into the results of experiments conducted using the direct measurement method.Consequently,a significant number of experiments are required to verify the results.Additionally,the discontinuity

关 键 词：飞秒激光 激光损伤阈值 硬脆材料 自动识别 外推法 

分 类 号：TN249[电子电信—物理电子学]