厚度对ZnS薄膜光学特性与力学特性的影响  

Effect of thickness on the optical and mechanical properties of ZnS thin films

作　　者：孟阳 陶海军[2] 刘华松[1] 孙鹏[1] 白金林 杨仕琪 MENG Yang;TAO Haijun;LIU Huasong;SUN Peng;BAI Jinlin;YANG Shiqi(Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China;College of Materials Science and Technology,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China)

机构地区：[1]天津津航技术物理研究所天津市薄膜光学重点实验室,天津300308 [2]南京航空航天大学材料科学与技术学院,江苏南京211106

出　　处：《红外与激光工程》2025年第3期211-218,共8页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(61975150);同济大学先进微结构材料教育部重点实验室开放基金项目;天津市自然科学重点基金项目(23JCZDJC00150)。

摘　　要：ZnS是重要的宽光谱光学薄膜材料,在宽带红外增透膜膜系中常常需要使用几十纳米到几百纳米的ZnS薄膜。为了明确厚度对ZnS薄膜性能的影响,使用离子辅助电阻热蒸发法在熔融石英基底上镀制了不同厚度的ZnS薄膜,分析了不同厚度ZnS薄膜的光学特性与力学特性。实验数据表明,随着ZnS薄膜厚度的增加,薄膜晶粒尺寸也随之增大;ZnS薄膜均呈现压应力,并且应力随厚度增加而减小;ZnS薄膜的折射率随着厚度增加而增大,当膜厚增加到50 nm以后,折射率接近于块状ZnS折射率,进一步增加薄膜厚度折射率趋于稳定值。通过研究,获得了ZnS薄膜膜层厚度对光学和力学特性的影响规律,可以用于指导高性能宽带红外光学多层膜的设计和制备。Objective ZnS is an important infrared material,and ZnS thin films with thicknesses ranging from several nanometers to hundreds of nanometers are often used in broadband infrared anti-reflection film systems.The change in thickness significantly alters the optical and mechanical properties of ZnS thin films,thereby affecting the optical transmittance and stability of multilayer film systems.Therefore,it is necessary to obtain accurate information on the influence of thickness on the characteristics of ZnS thin films.Methods This article explores the influence of thickness below 100 nanometers on the properties of thin films.ZnS thin films with different thicknesses were deposited on a SiO2 substrate using ion-assisted resistive thermal evaporation.The crystallographic properties of the thin films were characterized using a Rigaku D/MAX 2500 Xray diffractometer,with X-ray tube voltage and current set to 40 kV and 200 mA,respectively.The surface profile of the thin film before and after deposition was measured using a ZYGO surface interferometer,and the film stress was calculated using the Stoney equation based on the change in curvature radius.The transmittance of the thin film was measured using a spectrophotometer(Lambda 900,PE,Waltham,MA,USA),and the optical constants and accurate thickness of the thin film were obtained by fitting its spectral curve using a full-spectrum fitting method.Results and Discussions The optical and mechanical properties of the ZnS thin films with different thicknesses were analyzed.Figure 1 and Fig.2 illustrate that the ZnS film is sphalerite structure,and the grain size of the film increases with the increase of film thickness.As illustrated in Fig.3,the thin film exhibited compressive stress,and the stress decreased as the thickness increased.Through the analysis of the previous part,it has been clear that the crystallization property of the film is improved with the increase of thickness,which is attributed to the increase of grain size,the reduction of lattice defects between gra

关 键 词：光学薄膜 薄膜性能 微观结构分析 硫化锌薄膜 光学特性 力学特性 

分 类 号：O484[理学—固体物理]