表面化学镀铜的新型高导电单壁碳纳米管薄膜的制备  

Preparation of New Highly Conductive Single-walled Carbon Nanotube Film with Electroless Copper Plating on Surface

作　　者：王宇 舒颖[1] 孟丹丹 汪镭 WANG Yu;SHU Ying;MENG Dandan;WANG Lei(Chengdu Institute of Organic Chemistry,Chinese Academy of Sciences,Chengdu 610041,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院成都有机化学研究所,四川成都610041 [2]中国科学院大学,北京100049

出　　处：《合成化学》2025年第2期103-110,共8页Chinese Journal of Synthetic Chemistry

基　　金：中国科学院“西部之光”人才项目。

摘　　要：在Cu基复合材料中,碳纳米管(CNT)常被用作强而硬的增强体,而Cu-CNT复合材料由于具有较高的电流密度,在微电子领域显示出一些重要的应用。本文采用真空过滤法和化学镀铜法首次制备了高导电的铜-单壁碳纳米管(Cu-SWCNT)复合薄膜。其中化学镀铜法是先对高纯单壁碳纳米管(SWCNT)薄膜进行敏化和活化处理,再以甲醛为还原剂对其表面进行化学镀铜。为了使铜层在SWCNT薄膜表面均匀生长,研究了活化过程在化学镀铜中的作用,并通过改变敏化和活化时间得到了化学镀铜的最佳条件。结合XRD、SEM、XPS和Raman光谱对薄膜进行了表征,确定了最佳敏化及活化时间,并利用四探针电阻测试仪测量薄膜的方块电阻并计算得到电导率。结果表明:导电薄膜的最佳敏化和活化处理时间为10 min,此时的电导率为6.59×10^(5) S/m,相比于原始SWCNT薄膜的电导率(1.78×10^(5)S/m)提高了3.7倍。In Cu-based composites,CNT is often used as a strong and hard reinforcement,and Cu-CNT composites have shown some important applications in the field of microelectronics due to their high current density.In this paper,copper-single-walled carbon nanotubes(Cu-SWCNT)composite films with high conductivity were prepared by vacuum filtration method and electroless copper plating method for the first time.The electroless copper plating process is firstly to sensitize and activate the SWCNT film,and then use formaldehyde as a reducing agent to electroless copper plating on its surface.In order to make the copper layer grow uniformly on the surface of SWCNT film,the activation process in electroless copper plating was studied,and the optimum conditions of electroless copper plating were obtained by changing the sensitization and activation time.The film was characterized by XRD,SEM,XPS and Raman spectroscopy to determine the optimal sensitization and activation time.The sheet resistance of the film was measured by a four-probe resistance tester and the conductivity was calculated.The results show that the optimal sensitization and activation time of the conductive film is 10 min,and the conductivity is 6.59×10^(5)S/m,which is 3.7 times higher than that of the original SWCNT film(1.78×10^(5)S/m).

关 键 词：单壁碳纳米管薄膜 铜-单壁碳纳米管复合薄膜 化学镀铜 新型导电薄膜 真空过滤 

分 类 号：TB383[一般工业技术—材料科学与工程]