柔性氧化锌声表面波器件的研究  

Flexible ZnO surface acoustic wave devices

作　　者：刘兴鹏 王明宣 张永杰 杨俊锋 邓卫平 LIU Xingpeng;WANG Mingxuan;ZHANG Yongjie;YANG Junfeng;DENG Weiping(Guangxi Key Laboratory of Conformational Relationships of Electronic Information Materials,School of Information and Communication,Guilin University of Electronic Science and Technology,Guilin 541010,Guangxi Zhuang Autonomous Region,China;Guangzhou Tianji Electronics Technology Co.,Ltd.,Guangzhou 511453,China)

机构地区：[1]桂林电子科技大学信息与通信学院广西电子信息材料构效关系重点实验室,广西桂林541010 [2]广州天极电子科技股份有限公司,广东广州511453

出　　处：《电子元件与材料》2025年第2期135-141,共7页Electronic Components And Materials

基　　金：广西自然科学基金(2023GXNSFBA026216);广西电子信息材料构效关系重点实验室自主研究基金(231015-Z)。

摘　　要：为了研究基于柔性衬底的Zno压电薄膜的声表面波谐振器,选择以氟晶云母为衬底,通过磁控溅射技术在柔性云母衬底上优化了ZnO压电薄膜的生长条件,确定了最佳工艺参数:氩氧气体流量比为300∶20,工艺气压为1.0Pa,衬底加热温度为300℃,在该参数下所制备的ZnO的摇摆曲线半高宽为1.7°。通过在ZnO与云母间引入SrTiO_(3)(STO)热膨胀缓冲层,解决了高温退火导致ZnO薄膜龟裂的问题,成功防止了700℃退火时的龟裂,并且没有影响ZnO的c轴结晶的质量,其摇摆曲线半高宽为2.0°。采用紫外光刻技术并且结合优化后的ZnO薄膜和STO缓冲层,成功制造出ZnO/STO/Mica柔性声表面波谐振器,该谐振器表现出约189MHz的谐振频率。The ZnO piezoelectric thin films on the flexible mica substrates for Surface Acoustic Wave(SAW)resonators were investigated.ZnO piezoelectric thin films were optimized using the magnetron sputtering technique on the flexible mica substrates.The optimal growth conditions of the ZnO piezoelectric thin films were determined.The best process parameters were found to be the argon-to-oxygen flow rate ratio of 300∶20,the process pressure of 1.0 Pa,and the substrate heating temperature of 300℃.Under these parameters,the full width at half maximum(FWHM)of the rocking curve of the fabricated ZnO was 1.7°.A SrTiO_(3)(STO)thermal expansion buffer layer was introduced between the ZnO thin film and mica to address the cracking of ZnO thin films caused by high-temperature annealing.This cracking was successfully prevented during annealing at 700℃without affecting the quality of the c-axis crystallization of ZnO films,with the FWHM of the rocking curve of 2.0°.Using ultraviolet photolithography technology combined with the optimized ZnO thin films and STO buffer layer,a flexible SAW resonator of ZnO/STO/Mica was successfully fabricated.This resonator exhibits a resonant frequency of approximately 189 MHz.

关 键 词：磁控溅射 云母 ZNO SrTiO_(3) 声表面波谐振器 

分 类 号：TN384[电子电信—物理电子学]