基于微环谐振器的微型电场与电流传感器设计研究  

Design of miniaturized sensors for electric fields and currents utilizing micro-ring resonators

作　　者：叶升言 李俊峰 程亮 杨燚虎 马瑞 YE Shengyan;LI Junfeng;CHENG Liang;YANG Yihu;MA Rui(Dehong Power Supply Bureau of Yunnan Power Grid Co.,Ltd.,Dehong Prefecture 678499,Yunnan Province,China;Kunming Nengren Technology Co.,Ltd.,Kunming 650000,China)

机构地区：[1]云南电网有限责任公司德宏供电局,云南德宏州678499 [2]昆明能瑞科技有限公司,云南昆明650000

出　　处：《电子元件与材料》2025年第2期157-164,共8页Electronic Components And Materials

基　　金：南方电网公司科技项目(CG0500062001536074)。

摘　　要：研究基于电光效应和磁热效应原理,设计并优化了基于微环谐振器的微型电场与电流传感器。通过改进光栅耦合器与微环谐振器的配置,实现传感器灵敏度和品质因数的提升。实验结果显示,在直流电场作用下,电场传感器的谐振波长显著红移,品质因数高达5894,消光比为8.05dB。对于电流传感器,在交流电流环境中,其谐振波长的偏移与电流幅度的平方成正比,且不同半径(5,10,15μm)的传感器灵敏度分别为1.735,3.297和5.227nm/A^(2)。研究结果表明,优化后的传感器具备高灵敏度与良好的线性响应特性,在灵敏度、温度稳定性、尺寸集成度以及适用性等方面展现出综合优势,满足多种应用场景的实际需求。Based on the principles of the electro-optic effect and magneto-thermal effect,the micro-electric field and current sensors based on micro-ring resonators were designed and optimized.By enhancing the configuration of the grating coupler and the micro-ring resonator,the sensitivity and quality factor of the sensors were improved.The experimental results indicate that under the influence of the DC electric field,the resonant wavelength of the electric field sensor significantly redshifts,with a quality factor as high as 5894 and an extinction ratio of 8.05 dB.For the current sensor,under AC current conditions,the resonant wavelength shift is proportional to the square of the current amplitude.And the sensitivity is 1.735,3.297,and 5.227 nm/A^(2) for sensors with radii of 5μm,10μm,and 15μm,respectively.The findings demonstrate that the optimized sensors possess high sensitivity and excellent linear response characteristics,exhibiting comprehensive advantages in sensitivity,temperature stability,dimensional integration,and applicability,which could meet the actual needs of various application scenarios.

关 键 词：微环谐振器 微型电场传感器 电流传感器 光栅耦合器 优化设计 

分 类 号：TM917[电气工程—电力电子与电力传动]