器件级带电器件模型静电放电测试标准分析及应用  

Analysis and application of electrostatic discharge testing standards for device level charged device models

作　　者：江徽 唐震 王倩倩 万永康 虞勇坚[1,2] Jiang Hui;Tang Zhen;Wang Qianqian;Wan Yongkang;Yu Yongjian(China Electronics Technology Group Corporation No.58 Research Institute,Wuxi 214035,China;Key Laboratory of Integrated Circuit Testing and Reliability,Wuxi 214035,China)

机构地区：[1]中国电子科技集团公司第五十八研究所,江苏无锡214035 [2]无锡市集成电路测试和可靠性重点实验室,江苏无锡214035

出　　处：《电子技术应用》2025年第4期35-39,共5页Application of Electronic Technique

摘　　要：针对器件级带电器件模型(CDM)静电放电国内外主要测试标准进行了整理、分析与解读。梳理了各标准之间的差异性和关联性,明确了各标准的应用范围与技术要点。深入研究了影响器件级带电器件模型(CDM)静电放电测试结果的因素与控制方法,提出了在标准应用过程中保障结果一致性和准确性的相关技术技巧,为器件级带电器件模型(CDM)测试标准的选择、测试和工程应用提供了指导。This article summarizes,analyzes,and interprets the main testing standards for electrostatic discharge of device level charged device models(CDM)both domestically and internationally.The differences and correlations between various standards were sorted out,and the application scope and technical points of each standard were clarified.The impact factors and control methods that affect the testing results of device level charged device models(CDM)were deeply studied.Relevant technical skills were proposed to ensure the consistency and accuracy of test results in the standard application process,providing guidance for the selection,testing,and engineering application of device level charged device model testing standards.

关 键 词：带电器件模型 器件级 测试标准 

分 类 号：TN306[电子电信—物理电子学]