高精密装片头运动平台摩擦力测试与模型辨识研究  

Research on Friction Test and Parameter Identification of High Precision Chip Loading Motion Platform

作　　者：梁伟明 钱承山[1,2] 朱友为 花国祥 陈怀荣 张翔 LIANG Weiming;QIAN Chengshan;ZHU Youwei;HUA Guoxiang;CHEN Huairong;ZHANG Xiang(School of Automation,Nanjing University of Information Science and Technology,Nanjing 210044,China;School of Automation,Wuxi University,Wuxi 214105,China;不详)

机构地区：[1]南京信息工程大学自动化学院,南京210044 [2]无锡学院自动化学院,无锡214105 [3]奥特维科技股份有限公司,无锡214000

出　　处：《组合机床与自动化加工技术》2025年第4期47-51,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：江苏省基础研究计划自然科学基金-青年基金项目(BK20230173)。

摘　　要：在芯片贴装过程中,对装片头运动平台非线性摩擦力进行补偿是提高装片精度的有效途径,目前运动平台的摩擦特性难以准确描述,为此设计并搭建了运动平台等效摩擦力测试系统,并进行了摩擦力测试实验。根据测试的摩擦力数据,通过牛顿-拉夫逊优化算法(Newton-raphson-based optimizer,NRBO)对摩擦力模型进行参数辨识,仿真结果表明辨识出的摩擦力理论模型与实际测试结果相吻合,有效地提高了摩擦力模型的辨识精度,为后续设计高性能控制器时实现运动平台摩擦力的精确补偿奠定了基础。In the process of chip loading,compensating the nonlinear friction of the chip loading motion platform is an effective way to improve the accuracy of the loading,but the friction characteristics of the motion platform are difficult to be accurately described.Therefore,the equivalent friction testing system of the moving platform is designed and built,and the friction testing experiment is carried out.According to the tested friction data,parameters of the friction model were identified by Newton-raphson-based optimizer(NRBO),and the simulation results showed that the identified theoretical model of friction was consistent with the actual test results.The identification accuracy of friction model is improved effectively,which lays a foundation for the accurate compensation of friction of motion platform when designing high-performance controller.

关 键 词：芯片贴装 非线性摩擦力 牛顿-拉夫逊优化算法 模型辨识 

分 类 号：TH165[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]