基于电磁力的气浮触针位移传感器动态参数调控方法研究  

Dynamic Parameter Control Method Study of Air-bearing Stylus Displacement Sensor Based on Electromagnetic Force

作　　者：祁博洋 常素萍[1] 张国庆 刘尚军 QI Boyang;CHANG Suping;ZHANG Guoqing;LIU Shangjun(School of Mechanical Science and Engineering,Huazhong University of Science and Technology;Wuhan Maritime Communication Research Institute)

机构地区：[1]华中科技大学机械科学与工程学院 [2]武汉船舶通信研究所

出　　处：《仪表技术与传感器》2025年第3期1-5,10,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金(51675207)。

摘　　要：基于气浮触针位移传感器的动态模型,分析动态特性的影响因素,研究基于电磁力的动态特性调控方法,并通过实验验证了该方法的可行性。实验结果表明:该方法能有效调控气浮触针位移传感器的动态特性参数;当线圈电流从1.0 A增大至1.8 A时,阻尼比增大46%,调节时间减少40.2%。Based on the dynamic model of air-bearing stylus displacement sensor,the influencing factors of dynamic characteristics were analyzed,and the dynamic characteristics control method based on electromagnetic force was studied,and the feasibility of the method was verified by experiments.The experimental results show that this method can effectively control the dynamic characteristic parameters of the air-bearing stylus displacement sensor.When the coil current is increased from 1.0 A to 1.8 A,the damping ratio is increased by 46%and the adjustment time is reduced by 40.2%.

关 键 词：表面形貌测量 气浮触针 动态特性 电磁调控 

分 类 号：TG806[金属学及工艺—公差测量技术] TH703[机械工程—仪器科学与技术]