磁控溅射工艺对金属涂层光纤的抗拉性能影响  

Influence of Magnetron Sputtering Process on Tensile Properties of Metal-Coated Fibers

作　　者：王俊[1] 钟进 李欣仪 郁建科 胡芳仁[1] 张伟[1] Wang Jun;Zhong Jin;Li Xinyi;Yu Jianke;Hu Fangren;Zhang Wei(Nanjing University of Posts and Telecommunications,College of Electronic and Optical Engineering&College of Flexible Electronics(Future Technology),Nanjing 210023,Jiangsu,China;Dongguan Xiangtong Photoelectric Technology Co.,Ltd.,Dongguan 523000,Guangdong,China)

机构地区：[1]南京邮电大学电子与光学工程学院,柔性电子(未来技术)学院,江苏南京210023 [2]东莞市翔通光电技术有限公司,广东东莞523000

出　　处：《激光与光电子学进展》2025年第1期160-166,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51602160,61574080);江苏省自然科学基金(BK20150842);南京邮电大学校级自然科学基金(NY222127)。

摘　　要：由于重金属废液处理成本不断上升,环境法规日益严格,磁控溅射有望取代传统的化学镀和电镀方法,逐步成为光纤金属涂层的常见制备技术,其制备工艺或对光纤的力学性能有显著影响。本研究旨在探究磁控溅射工艺对金属涂层光纤抗拉性能的影响,并优化相关工艺参数。在正式制备金属涂层之前,采用激光剥纤、光纤装配以及等离子清洗等预处理方法。通过扫描电子显微镜对金属涂层进行微观表征,并使用万能试验机测试金属化光纤的抗拉强度。结果显示,预处理对光纤的抗拉强度影响不大,而溅射工艺中的溅射功率、气压、沉积时间参数变化显著影响光纤抗拉性能。此外,采用与SiO_(2)弹性模量相近的金属制备的光纤具备更高的抗拉强度。磁控溅射工艺对金属化光纤的抗拉性能具有重要的影响,优化工艺参数可提高光纤的力学性能,为其在各种应用中的稳定性和可靠性提供基础支撑。With the increasing costs of heavy-metal wastewater treatment and stricter requirements of environmental legislation,traditional chemical and electroplating methods are expected to be replaced by magnetron sputtering,which is gradually becoming a common technique for preparing the metal coatings on optical fibers.Magnetron sputtering processing parameters have a significant impact on the mechanical properties of fibers.This study investigates the influence of the magnetron sputtering process on the tensile properties of metal-coated fibers,to optimize the relevant process parameters.Prior to the formal preparation of metal coatings,pre-treatments such as laser stripping,fiber assembly,and plasma cleaning were employed.The microstructures of metal coating were characterized using scanning electron microscopy,and the tensile strength of metal-coated fibers was tested using a universal testing machine.The results reveal that pre-treatment has minimal effect on the tensile strength of fibers.However,variations in sputtering power,gas pressure,and deposition time(thickness)significantly affect tensile properties of fibers.Additionally,fibers coated with metals having elastic moduli close to SiO_(2) exhibit higher tensile strength.In summary,the magnetron sputtering process has a crucial impact on the tensile properties of metal-coated fibers,and the optimization of process parameters can improve the mechanical performance of fibers,providing foundational support for their stability and reliability in various applications.

关 键 词：磁控溅射 光纤 金属涂层 工艺参数 抗拉强度 

分 类 号：TN818[电子电信—信息与通信工程]