多晶硅尾气过滤材料研究进展  

Research progress on filtration materials for exhaust gas during production of polysilicon

作　　者：杨舒薇 王晶[1] 王启立[1] 周舟[2] Yang Shu-wei;Wang Jing;Wang Qi-li;Zhou Zhou(School of Chemical Engineering&Technology,China University of Mining and Technology,Jiangsu Xuzhou 221000,China;Jiangsu Zhongneng Polysilicon Technology Development Company,Jiangsu Xuzhou 221004,China)

机构地区：[1]中国矿业大学化工学院,江苏徐州221000 [2]江苏中能硅业科技发展有限公司,江苏徐州221004

出　　处：《炭素技术》2025年第1期19-23,共5页Carbon Techniques

基　　金：国家自然科学基金项目(22208369);中国矿业大学安全学科群“双一流”省部创新项目(AQQ-SYLSB2003-0X)。

摘　　要：多晶硅生产还原过程产生的大量无定形硅会影响多晶硅的生产安全及产品质量,需将其从气体中分离,通常采用金属及陶瓷过滤除尘方式。这2种除尘方式用于多晶硅尾气过滤虽然有很多优点,但也存在成本较高、耐腐蚀性或抗热震性差的缺点。本文阐述了各类金属及陶瓷过滤材料的特点及目前多晶硅尾气用过滤材料研究现状,并根据多晶硅还原炉尾气特点,提出可将成本相对较低且相关性能良好的过滤用多孔炭-石墨材料用于多晶硅还原炉尾气除尘,在保证生产质量的前提下降低多晶硅生产成本。The large amount of amorphous silicon produced in the production process of polysilicon will affect the production safety and product quality of polysilicon, so it needs to be separated from the gas through metal and ceramic filtration.The two dust removal methods have many advantages for polysilicon tail gas filtration, but they also have the shortcomings of high cost, poor corrosion resistance or thermal shock resistance.The characteristics of various metal and ceramic filtration materials and research status of filter materials for polycrystalline silicon exhaust gas are reviewed.According to the features of the exhaust gas of the polysilicon reduction furnace, it is proposed that the filter porous carbon-graphite material with relatively low cost and good related properties can be used for the exhaust dust removal of the polysilicon production.Therefore, the production cost can be reduced under the premise of ensuring the production quality.

关 键 词：过滤 多晶硅 多孔炭-石墨 

分 类 号：TQ127.11[化学工程—无机化工] TF533.2[冶金工程—钢铁冶金]