非晶四面体碳膜对2Cr3WMoV合金钢表面耐磨性能的影响  

Effect of Tetrahedral Amorphous Carbon Film on the Friction Properties of 2Cr3WMoV Alloy Steel

作　　者：李远洁[1] 赵玉清[1] 王炎武 董乃强 LI Yuanjie;ZHAO Yuqing;WANG Yanwu;DONG Naiqiang(Department of Electronic Science and Engineering,Xi'an Jiaotong University,Xi'an Shaanxi 710049,China;Shaanxi Aien Shuneng Carbon Based Technology Co.,Ltd.,Xi'an Shaanxi 710086,China;Xi'an Aero-Engine Controls Technology Co.,Ltd.,Xi'an Shaanxi 710077,China)

机构地区：[1]西安交通大学电子科学与工程学院,陕西西安710049 [2]陕西埃恩束能碳基技术有限公司,陕西西安710086 [3]中国航发西安动力控制科技有限公司,陕西西安710077

出　　处：《润滑与密封》2025年第4期1-8,共8页Lubrication Engineering

基　　金：中国航发校企合作项目(JZ-202206010)。

摘　　要：为提高2Cr3WMoV合金钢的表面摩擦性能,利用磁控溅射沉积技术与过滤阴极真空电弧技术分别在未经过渗碳和渗碳热处理后的2Cr3WMoV合金结构钢试样表面制备TiN过渡层及非晶四面体碳的多层结构复合膜。采用球-盘摩擦磨损试验仪、三维形貌仪、表面磨痕测量仪等对比分析不同合金结构钢试样镀膜前后的摩擦磨损性能。结果表明:渗碳热处理工艺对2Cr3WMoV合金钢制备非晶四面体碳基多层复合膜后试样的摩擦磨损性能影响较大,在渗碳2Cr3WMoV试样表面制备多层复合膜结构后,表面摩擦因数由0.54降低到0.077,磨损率由3.03×10^(-9)cm^(3)/(N·m)降低到9.44×10^(-10)cm^(3)/(N·m)。由于表面渗碳及抛光工艺提升了合金试样的表面硬度,并降低表面粗糙度,从而使该试样制备非晶四面体碳基复合膜后具有最为优异的摩擦磨损性能及膜层与基体的结合强度。To improve the surface friction properties of 2Cr3WMoV alloy steel,multilayered tetrahedral amorphous carbon(ta-C)films with the TiN buffer layers were deposited on the original and carburized 2Cr3WMoV sample surfacesusingradio frequency(RF)magnetron sputtering and filtered cathode vacuum arc technology(FCVA),respectively.The friction and wear properties of the original and carburized 2Cr3WMoV alloy steel samples with and without deposited ta-C films were characterized and analyzed using ball disc friction and wear tester,3D profilometer,surface abrasion measuring instrument,etc.It is shown that the carburizing heat treatment process has a significant impact on the friction and wear properties of 2Cr3WMoV samples after deposition of the ta-C film on the surface.The friction coefficient decreases from 0.54 to 0.077 for the carburized 2Cr3WMoV samples with multilayer composite films,and the wear rate decreases from 3.03×10^(-9)cm^(3)/(N·m)to 9.44×10^(-9)cm^(3)/(N·m).This study indicates that the improvement of the ta-C films on the friction and wear properties of the 2Cr3WMoV steels strongly depends on the surface hardness and roughness.The surface friction and wear properties and bonding strength of the ta-C films on 2Cr3WMoV alloys are both optimized after carburization process and surface polishing treatments.

关 键 词：非晶四面体碳膜 合金结构钢 表面渗碳处理 摩擦磨损性能 磁过滤阴极真空电弧 

分 类 号：TH117.1[机械工程—机械设计及理论] TB43[一般工业技术]